Phase-crossing algorithm for white-light fringes analysis

Pawłowski, M.; Sakano, Youhei; Miyamoto, Yoko; Takeda, Mitsuo

doi:10.1016/j.optcom.2005.10.013

Cited by 27 publications

(26 citation statements)

References 11 publications

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“…Among those algorithms analyzed were: phase-shifting, phase-crossing (Pawłowski et al, 2006), zero-crossing and Fourier-transform techniques. Algorithms that give an estimate of the envelope peak position from only a fraction of the interferogram (Sato & Ando, 2009) were also proposed.…”

Section: Algorithmsmentioning

confidence: 99%

Coherence Correlation Interferometry in Surface Topography Measurements

Kapłonek¹,

Łukianowicz²

2012

Recent Interferometry Applications in Topography and Astronomy

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Section: Algorithmsmentioning

confidence: 99%

Coherence Correlation Interferometry in Surface Topography Measurements

Kapłonek¹,

Łukianowicz²

2012

Recent Interferometry Applications in Topography and Astronomy

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“…[9][10][11] . For the pilot experiments we decided to use a phase-crossing algorithm as a detection technique 11 .…”

Section: Detection Technique -Phase-crossing Algorithmmentioning

confidence: 99%

Light source for low-coherence interferometry surface diagnostics

et al. 2011

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We describe in this paper a pilot experiment of optimization of a white-light source for a low-coherence interferometry. The white-light source combines the light beams generated with colour LEDs. By modelling of the white light spectra, a contrast of a white light interference fringe could be changed and set to the maximal value.The second part of this paper is a description of a white-light fringe analysis ensured with a low-cost colour CCD camera. The used detection technique employs a phase-crossing algorithm which identifies a zero optical path difference as the point where the phase difference between the red, green and blue part of the white-light interference fringe becomes equal to zero.The optimized white light source is designed to be a crucial part of an experimental setup for the surface diagnostics and automatic calibration of gauge blocks.

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“…In the case of white light, interference occurs only when the optical path difference (OPD) between the objective and reference beams is nearly the same (within the coherence length of the light source) so by varying one of the arms we can measure the surface roughness, small height variations and thickness of the microstructures. various schemes in WLI, such as, vertical scanning interferometry (VSI) [16,17], phase shifting interferometry (PSI) [18][19][20][21][22], fringe projection method [23][24][25][26][27], Fourier profilometry [27,28], confocal microscope [29]. In the aforementioned methods Linnik, Michelson and Mirau type interferometric objectives are used [12][13][14].…”

Section: Introductionmentioning

confidence: 99%

“…This has been extensively used in optical metrology for step height measurement. The phase shifting method, snapshot color fringe projection, digital fringe projection and Fourier transform technique along with phase-crossing methods have been used to extract the phase maps for red, green and blue color interferograms [24,34,36,37]. But all these techniques require multiple interferograms to reconstruct the phase, which greatly increases the acquisition and analysis time.…”

Section: Introductionmentioning

confidence: 99%

Single Shot White Light Interference Microscopy for 3D Surface Profilometry Using Single Chip Color Camera

Srivastava

Inam²,

Kumar³

et al. 2016

Journal of the Optical Society of Korea

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We present a single shot low coherence white light Hilbert phase microscopy (WL-HPM) for quantitative phase imaging of Si opto-electronic devices, i.e., Si integrated circuits (Si-ICs) and Si solar cells. White light interferograms were recorded by a color CCD camera and the interferogram is decomposed into the three colors red, green and blue. Spatial carrier frequency of the WL interferogram was increased sufficiently by means of introducing a tilt in the interferometer. Hilbert transform fringe analysis was used to reconstruct the phase map for red, green and blue colors from the single interferogram. 3D step height map of Si-ICs and Si solar cells was reconstructed at multiple wavelengths from a single interferogram. Experimental results were compared with Atomic Force Microscopy and they were found to be close to each other. The present technique is non-contact, full-field and fast for the determination of surface roughness variation and morphological features of the objects at multiple wavelengths.

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Phase-crossing algorithm for white-light fringes analysis

Cited by 27 publications

References 11 publications

Coherence Correlation Interferometry in Surface Topography Measurements

Coherence Correlation Interferometry in Surface Topography Measurements

Light source for low-coherence interferometry surface diagnostics

Single Shot White Light Interference Microscopy for 3D Surface Profilometry Using Single Chip Color Camera

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