2007
DOI: 10.1557/proc-0989-a08-01
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Phase Control and Stability of Thin Silicon Films Deposited from Silane Diluted with Hydrogen

Abstract: Hydrogen dilution of silane during the rf-PECVD growth of a-Si:H absorber layers is used to suppress light-induced degradation of a-Si:H solar cells. The increased stability of cells and films deposited using hydrogen dilution is verified in an accelerated degradation experiment. At higher hydrogen dilutions the early phase transition to the microcrystalline phase complicates the growth of fully amorphous films as absorbers with a sufficient thickness. In a systematic study on the influence of various depositi… Show more

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Cited by 6 publications
(4 citation statements)
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“…Figure 4 shows the time-dependence of the S-parameter for the samples with dilution ratio's R=0 and R=10, for which FTPS measurements were performed in the as-deposited state and after 120 min of light soaking (Table 2). A clear decrease in positron S parameter was observed for the R=0 sample, indicative of a logarithmic time dependence previously observed for laser-light exposed samples [8]. On the other hand, S fluctuates around a constant level for the R=10 sample.…”
Section: Light Soakingsupporting
confidence: 74%
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“…Figure 4 shows the time-dependence of the S-parameter for the samples with dilution ratio's R=0 and R=10, for which FTPS measurements were performed in the as-deposited state and after 120 min of light soaking (Table 2). A clear decrease in positron S parameter was observed for the R=0 sample, indicative of a logarithmic time dependence previously observed for laser-light exposed samples [8]. On the other hand, S fluctuates around a constant level for the R=10 sample.…”
Section: Light Soakingsupporting
confidence: 74%
“…Raman spectroscopy was used to verify that these changes are not due to the appearance of crystalline domains. The latter may occur at high R-values, but this is only expected when using lower deposition pressures [8]. The sharp 520 cm -1 Raman peak, characteristic for crystalline domains, was absent in all cases.…”
Section: Methodsmentioning
confidence: 80%
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“…Since the volume density of atoms in amorphous Si is around 4 × 10 22 cm −2 , we may approximately attribute the α (1.2 eV) roughly to the defect ppm (parts per million). The level of 1 ppm is a benchmark for a state-of-the-art laboratory-grade material prepared by capacitively-coupled diode plasma-enhanced chemical vapor deposition (PE-CVD) in a light-soaked state (1000 h, 1 sun, 50 • C) (see Figure 1b) [2,17].…”
Section: Introductionmentioning
confidence: 99%