Phase-Change Memory With Multifin Thin-Film-Transistor Driver Technology

Bias temperature instability comparison of CMOS LTPS-TFTs with HfO2 gate dielectric

“…Low-temperature poly-Si thin-film transistors (LTPS-TFTs) have been widely studied for the application of active matrix liquid crystal display [1], organic light-emitting diode display [2], system-onpanel (SOP) and 3D integrated circuit (3D-IC) [3][4][5]. The employment of high-j gate dielectric is a simple way to achieve high electrical performance of LTPS-TFTs without any additional defect passivation process due to its high gate capacitance density [6][7][8].…”