Abstract:A highly sensitive probe to measure thin film permeability was developed based on the skin effect. A microstrip-line-type probe on a flexible polyimide substrate was fabricated and placed in contact with a magnetic thin film. The permeability was optimized by the Newton-Raphson method. The permeability of amorphous Co85Nb12Zr3 film (25 mm x 25 mm and 5 nm in thickness) was evaluated using a permeameter. The measured values were in rough agreement with theoretical values based on the Landau-Lifshitz-Gilbert equ… Show more
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