Permalloy Patterning Effects on RF Inductors

Ni, Weiping; Kim, J.; Kan, Edwin C.

doi:10.1109/tmag.2006.879140

Cited by 20 publications

(6 citation statements)

References 6 publications

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“…On-chip spiral inductors have played an increasingly important role in integrated circuits, such as converters, filters, mixers, and oscillators [1]. Due to the widespread use in the wireless communications technology and the strongly desire of smaller size for integrated packaging, the planar spiral inductors have gained interest in this area.…”

Section: Introductionmentioning

confidence: 99%

A MEMS-based Double-layer Spiral Planar Inductor using Patterned Permalloy filled with Ferrite/Polyimide Composite Materials as Magnetic Layers

Zhu¹,

Cheng²,

Chen³

et al. 2017

2017 4th International Materials, Machinery and Civil Engineering Conference (MATMCE 2017)

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Abstract.A MEMS-based planar inductor with double-layer spiral coil structure is developed in this study. The patterned permalloy which blank are filled with MnZn ferrite/PI composite materials is used as the magnetic layer of the inductor as well as the magnetic shielding layers. The double-layer planar inductor has a size of 1.5×1.5×0.15mm consisted of 13-turn spiral Cu coil for each layer and a 20-μm-thick patterned permalloy magnetic layers filled with MnZn ferrite/PI composite materials above and below. The inductor shows a higher inductance than the traditional planar inductor. The patterned permalloy made the inductor more stable in high frequency than the none-patterned. And the filling MnZn ferrite/PI composite materials made the inductor to achieve more excellent insulation and lower dissipation characteristics. And the inductor has an inductance of 1.3μH and quality factor of 2.8 at 1.5MHz.

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Section: Introductionmentioning

confidence: 99%

A MEMS-based Double-layer Spiral Planar Inductor using Patterned Permalloy filled with Ferrite/Polyimide Composite Materials as Magnetic Layers

Zhu¹,

Cheng²,

Chen³

et al. 2017

2017 4th International Materials, Machinery and Civil Engineering Conference (MATMCE 2017)

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“…Research on soft ferromagnetic films for high-frequency electronic applications have been mainly driven by the demand on novel micro-inductors [1][2][3], filters as well as electromagnetic noise absorber concepts [4,5]. Latest concepts of conditioning ferromagnetic films have been realised to make them suitable for high-frequency performance [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Influence of grain growth on the high-frequency behaviour of ferromagnetic Fe–Co–(M)–N (M=Ta, Hf) nanocomposite films

Seemann¹,

Leiste²

2009

Journal of Magnetism and Magnetic Materials

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“…The inductance within a unit area could be enhanced generally by using a ferromagnetic film with high relative permeability, such as Permalloy, 1 Co 85 Nb 12 Zr 3 , 2 and FeCoAlN. 3 However, due to the low resistivity, the ferromagnetic film also introduces excess eddy currents and parasitics which results in a lower quality factor and resonance frequency.…”

Section: Introductionmentioning

confidence: 99%

“…Patterning of ferromagnetic film then needs to follow to further control the eddy currents induced by time-varying magnetic fields. 1,2 In this paper, systematic research on patterned magnetic inductors with a FeNi-SiO 2 granular film is performed. Postannealing process in vacuum is also carried out to obtain a better performance.…”

Section: Introductionmentioning

confidence: 99%

A study of patterning and annealing effects on the performance of magnetic planar inductor

Sun

Liu

Zhao

et al. 2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Study on the patterning and annealing effect of planar inductors with composite ferromagnetic films has been presented in this article. The magnetic films (MFs) are deposited on the same coil structure and then followed by an annealing process in vacuum. Two equivalent circuits are proposed to analyze the modification of inductor performance. The patterned inductors exhibit higher quality factor without much decrease of inductance compared with the nonpatterned one. The square-type inductor shows the highest peak value of quality factor (16.01 at 1.15GHz) because of the finest MF division. After annealing, both the inductance and quality factor of the four types of inductors are increased, and the nonpatterned inductor shows the largest increment of inductance.

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Permalloy Patterning Effects on RF Inductors

Cited by 20 publications

References 6 publications

A MEMS-based Double-layer Spiral Planar Inductor using Patterned Permalloy filled with Ferrite/Polyimide Composite Materials as Magnetic Layers

A MEMS-based Double-layer Spiral Planar Inductor using Patterned Permalloy filled with Ferrite/Polyimide Composite Materials as Magnetic Layers

Influence of grain growth on the high-frequency behaviour of ferromagnetic Fe–Co–(M)–N (M=Ta, Hf) nanocomposite films

A study of patterning and annealing effects on the performance of magnetic planar inductor

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