Periodic structures prepared by two-beam interference method

Škriniarová, J.; Pudiš, Dušan; Martinček, Ivan; Kováč, J.; Tarjányi, Norbert; Veselý, M.; Turek, Ivan

doi:10.1016/j.mejo.2007.04.004

Cited by 24 publications

(8 citation statements)

References 9 publications

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“…MLA can produce multiple confocal spots very useful for optical trapping and sorting in LOC devices [10]. Microlens arrays was prepared by different techniques using DLW lithography [8], polystyrene array master [11] and interference lithography [12]. Created structures then serve as a master for imprinting process.…”

Section: Micro-opticsmentioning

confidence: 99%

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PDMS based micro-optics and microchannels for lab-on-a-chip application

et al. 2015

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We describe new technologies for a fabrication of microfluidics and micro-optics components for lab-on-a-chip applications based on polydimethylsiloxane. We use combination of direct laser writing (DLW) lithography for channel patterning in photoresist layer with PDMS imprinting process. Unique imprinting and optical properties favors PDMS for fabrication of different microchannels and microlens arrays. This technology allows the fabrication of different PDMS channel structures. Also PDMS based microlens arrays were patterned in photoresist layer by DLW process and also by interference lithography and imprinted in PDMS layer. Spontaneous microlens array based on polystyrene microspheres was also prepared by spin-coating of dispersed microspheres in photoresist and for organized microlens array we used predefined two-dimensional grid prepared by interference lithography. Final structures were investigated by confocal and optical microscope. The prepared PDMS and polystyrene based microdevices can be used in lab-on-achip applications in sensing and biological measurements.

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Section: Micro-opticsmentioning

confidence: 99%

“…IL using laser light is common technique for fabrication of periodic structures of different period and symmetry [12]. The thin photoresist layer of AZ 5214E of thickness 2 μm was deposited on silicon substrate with post-baking at 65°C for 2 minutes and at 100° C for 3 minutes.…”

Section: Mla Based On Pdmsmentioning

confidence: 99%

PDMS based micro-optics and microchannels for lab-on-a-chip application

et al. 2015

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“…However, fabrication of nonhexagonal (e.g., rectangular) arrays of nano-objects was previously possible only by expensive and complex electronbeam lithography procedures [38]. Double-exposure, twobeam interference lithography has been applied to fabricate one-dimensional and two-dimensional structures in gold film (e.g., rectangular array of nanoholes) [39]. Colloid sphere lithography has been used to generate imprinted nanochannel alumina patterns with hexagonal symmetry [40].…”

Section: Introductionmentioning

confidence: 99%

Spectral Engineering Via Complex Patterns of Circular Nano-Object Miniarrays: II. Concave Patterns Tunable by Integrated Lithography Realized by Circularly Polarized Light

et al. 2020

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The use of circularly polarized beams in interferometric illumination of colloid sphere monolayers enables the direct fabrication of rectangular patterns composed of circular nanohole miniarrays in metal films. This paper presents a study on the spectral and near-field effects of complex rectangular patterns consisted of a central nanoring and slightly rotated satellite nanocrescents in azimuthal orientations, which promote coupling between localized and propagating plasmons. To inspect the localized modes separately, we investigate the spectral responses and near-field phenomena of hexagonal patterns composed of uniform nanorings and nanocrescents, which can be fabricated by a single, homogeneous, circularly polarized beam incident perpendicularly and obliquely, respectively. To understand the interaction of localized and propagating modes, we analyze artificial rectangular patterns composed of a singlet nanoring, a singlet horizontal nanocrescent, and a quadrumer of four slightly rotated nanocrescents. The results demonstrate that on the rectangular pattern of a singlet horizontal nanocrescent the interacting C2 and C1 localized resonances in the C orientation ($$0^{\circ }$$ 0 ∘ azimuthal angle) and the U localized resonance coupled with propagating surface plasmon polaritons (SPPs) in the U orientation ($$90^{\circ }$$ 90 ∘ azimuthal angle) manifest themselves in similar split spectra. Moreover, split spectra appear due to the coupling of the azimuthal orientation independent localized resonance on the nanorings and the SPPs propagating on their rectangular pattern in the U orientation. The spectral response of the complex miniarray pattern can be precisely tuned by varying the geometrical parameters of the moderately interacting nanoholes and the pattern period. In appropriate configurations, the fluorescence of the dipolar emitters is enhanced, which has potential applications in bio-object detection.

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“…There are different ways for generation of 2D patterns by interference lithography using a single exposure of an interference pattern generated by multiple beams or using multiple exposures of an interference optical field produced by two beams. This multi exposure technique can be used for fabrication of different one and two dimensional periodic structures in photoresist materials as well as in different III-V compounds [12]. This paper proposes technology for fabrication of PhC in the surface of thin membranes for possible application in above introduced devices, however, we use new material polydimethylsiloxane (POMS), with significant optical and elastic properties.…”

Section: Introductionmentioning

confidence: 99%

PDMS membranes with 2D PhC for LEDs far-field pattern modification

et al. 2014

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In this paper we present new imprinting process for fabrication of PhC structures on surface of thin PDMS membranes. We used interference lithography in combination with imprinting technique. 2D PhC surface relief structures of period 495 nm were patterned in thin PDMS membranes with depth up to 100 nm. Patterned PDMS membranes placed on different optoelectronic device surface could modify the final optical properties.

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Periodic structures prepared by two-beam interference method

Cited by 24 publications

References 9 publications

PDMS based micro-optics and microchannels for lab-on-a-chip application

PDMS based micro-optics and microchannels for lab-on-a-chip application

Spectral Engineering Via Complex Patterns of Circular Nano-Object Miniarrays: II. Concave Patterns Tunable by Integrated Lithography Realized by Circularly Polarized Light

PDMS membranes with 2D PhC for LEDs far-field pattern modification

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