Performance of the Second Generation Solar Heating System in the Solar House of the Eindhoven University of Technology

Bisschops, R. W. G.; Koppen, C.W.J. van; Veltkamp, W.B.

doi:10.1007/978-94-009-6508-9_95

Cited by 3 publications

(1 citation statement)

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“…1͒. The cavity has been used to measure the electron and negative ion densities by microwave techniques, 15,16 and is created by extending the largest electrode around the plasma towards the smallest. Köhler et al 4 showed that the highest sheath voltage drop appears in front of the smallest electrode, irrespective whether this is the grounded or the driven one.…”

Section: Methodsmentioning

confidence: 99%

Mass-resolved ion energy measurements at both electrodes of a 13.56 MHz plasma in CF4

Snijkers

Sambeek

Hoppenbrouwers

et al. 1996

Journal of Applied Physics

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The ion energy distributions ͑IEDs͒ at the electrodes in a capacitively coupled 13.56 MHz plasma in CF 4 have been measured mass resolved with a Balzers quadrupole in combination with a home-built energy analyzer. Mass-resolved determination offers the possibility to compare the IED of different ions achieved in the same sheath. The IEDs have been determined at both the largest and the smallest electrode. Apart from the IEDs of the CF 4 species, the IEDs of ionic species in plasmas in argon and nitrogen also were determined. Apart from the CF 4 ionic species CF 3 ϩ , CF 2 ϩ , CF ϩ , and F ϩ , CHF 2 ϩ ions also are present in the CF 4 plasma due to residual water in the reactor. Because the CHF 2 ϩ ions are not produced in the sheath and because we do not detect elastically scattered ions, the IEDs of these ions show the typical bimodal distribution for rf plasmas which corresponds to an IED of ions which have not collided in the sheath. From these IEDs we can obtain the sheath characteristics, such as the averaged sheath potential. From the IEDs of CF n ϩ ions one can conclude that, in the sheath of the CF 4 plasma, a large number of chemical reactions takes place between the CF n ϩ ions and the neutrals.

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Section: Methodsmentioning

confidence: 99%