2013
DOI: 10.1088/1742-6596/425/21/212006
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Performance of an upgraded long trace profiler at NSRRC

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“…The LTP is equipped with an air-bearing scanning stage for the optical board. The entire stage comprises a ceramic rail, an air-bearing stage, and an encoder [10]. The stage had a motor outside the sliding stage and was driven by a traction wire to reduce the vibration effect generated by the motor to maintain smooth motion.…”
Section: Original Air-bearing Linear Slide System Of the Ltpmentioning
confidence: 99%
“…The LTP is equipped with an air-bearing scanning stage for the optical board. The entire stage comprises a ceramic rail, an air-bearing stage, and an encoder [10]. The stage had a motor outside the sliding stage and was driven by a traction wire to reduce the vibration effect generated by the motor to maintain smooth motion.…”
Section: Original Air-bearing Linear Slide System Of the Ltpmentioning
confidence: 99%