Performance Evaluation of Junctionless FinFET using Spacer Engineering at 15 nm Gate Length

Abstract

In this proposed work, performance of junctionless transistor with the use of spacers has been evaluated at 15nm gate length in Cogenda TCAD tool. This work is implemented as variation in four parts: changing the spacer extension length, placement of spacers having dual-κ, proportion of low and high-κ spacers, and value of high-κ dielectric constant. Impact of all these parameters is considered on the output of proposed device in terms of various output parameters like on-current (I ON ), off-current (I OFF ), subthreshold swing (SS), drain induced barrier lowering (DIBL), transconductance (g m ), transconductance generation factor (TGF), output conductance (g d ), early voltage (V ea ) and intrinsic gain (A v ). From the simulations, it has been observed that placing spacers of dual-κ along the left and right sides of gate region has improved device performance in terms of output parameters. Due to increased gate capacitances, the increase in dielectric constant value has degraded the device performance for longer spacer extension length. However, for shorter spacer extension length, the device characteristics are improved as the value of dielectric constant is increased. Therefore a trade-off is required to get the optimum results of the device. Parameters κ=15Source side Both sides Drain side