Performance and reliability of a new MEMS electrostatic lateral output motor

Patton, Steven T.; Cowan, William D.; Zabinski, J.S.

doi:10.1109/relphy.1999.761610

Cited by 26 publications

(17 citation statements)

References 12 publications

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“…Figure 16 (Patton et al 1999(Patton et al , 2000Smallwood et al 2006) is one of the typical devices fabricated with the Multi-User MEMS Process (MUMPs). This structure is mainly actuated by a lateral micromotor.…”

Section: Line-line Contact Testing Methodsmentioning

confidence: 99%

“…The electrostatic cantilever motor is driven by applying a voltage across the cantilever and the underlying conductive substrate. Patton et al (1999) studied the failure mechanism of this device at various RH (relative humidity). They found that both the electrical and tribological performance of the motor depended on RH.…”

Section: Line-line Contact Testing Methodsmentioning

confidence: 99%

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Research development of measuring methods on the tribology characters for movable MEMS devices: a review

et al. 2008

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Micro electro-mechanical systems (MEMS) offers great promise for system integration of sensors, actuators and signal processing. However, to the movable MEMS devices, there have always been major obstacles to their realization and reliability in the past-tribology problems. Because of the size effect, the conventional frictional law is no longer feasible to MEMS devices. It is vital to do research on micro-tribology and rebuild a microtribology theory in which size effect must be concerned. At the same time, in order to obtain reliable experimental data to support the theory, a feasible measuring method is also necessary. This paper describes two kinds of measuring methods to realize this purpose-on-chip measuring method and off-chip measuring method. Advantages, disadvantages, research status and the application prospect of each kind of methods are all introduced. Finally, development prospect of measuring methods is mentioned.

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Section: Line-line Contact Testing Methodsmentioning

confidence: 99%

Section: Line-line Contact Testing Methodsmentioning

confidence: 99%

Research development of measuring methods on the tribology characters for movable MEMS devices: a review

et al. 2008

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“…It has been demonstrated that humidity is a strong factor in the wear of rubbing surfaces in polysilicon microfabrication. The operation of MEMS in a very low humidity environment can lead to much greater amounts of wear debris than operation at higher humidity [56], [57]. As wear debris agglomerates, third body wear can be initiated which is often evidenced by scratches on surface.…”

Section: Wearmentioning

confidence: 99%

MEMS Reliability Review

Huang

Vasan

Doraiswami

et al. 2012

IEEE Trans. Device Mater. Relib.

153

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Abstract-Microelectromechanical systems (MEMS) represents a technology that integrates miniaturized mechanical and electromechanical components (i.e., sensors and actuators) that are made using microfabrication techniques. MEMS devices have become an essential component in a wide range of applications, ranging from medical and military to consumer electronics. As MEMS technology is implemented in a growing range of areas, the reliability of MEMS devices is a concern. Understanding the failure mechanisms is a prerequisite for quantifying and improving the reliability of MEMS devices. This paper reviews the common failure mechanisms in MEMS, including mechanical fracture, fatigue, creep, stiction, wear, electrical short and open, contamination, their effects on devices' performance, inspection techniques, and approaches to mitigate those failures through structure optimization and material selection.

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“…Owing to continuing movement of these surfaces, fracture tends to occur away from the bonded interface leading to augmented asperities and wear debris, although no evidence of these processes was presented. Another study on wear in (dry) air [40][41][42] suggested that as the surface oxide layer wears, it regenerates resulting only in the wear of silicon dioxide. Finally, a recent study on micronscale polycrystalline silicon [43] showed clear evidence of abrasive wear particles of amorphous SiO 2 after long sliding times; the smoothness of the majority of these particles was attributed to a polishing effect that occurred after the particles were initially created.…”

Section: Introductionmentioning

confidence: 99%