Wear mechanisms and friction parameters for sliding wear of micron-scale polysilicon sidewalls

Alsem, Daan Hein; Hulst, R. van der; Stach, Eric A.; Dugger, Michael Thomas; Hosson, J.Th.M. De; Ritchie, Robert O.

doi:10.1016/j.sna.2010.06.025

Cited by 15 publications

(4 citation statements)

References 73 publications

(120 reference statements)

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“…In particular, the recently proposed atom-by-atom wear mechanism was used to explain the wear of single-crystal silicon tips sliding on a polymer surface [5] and a diamond surface [7]. In addition, Alsem et al studied the sliding wear mechanisms using polycrystalline silicon friction MEMS specimens [11,12]. Bhushan et al carried out nanoscratching tests on silicon (100), specifically doped and undoped polysilicon at normal loads ranging from 20 to 100 µN [13,14].…”

Section: Introductionmentioning

confidence: 99%

Molecular Dynamics Simulation of Nanoscale Abrasive Wear of Polycrystalline Silicon

Zhu

Gong

2018

Crystals

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In this work, molecular dynamics simulations of the nanoscratching of polycrystalline and singlecrystalline silicon substrates using a single-crystal diamond tool are conducted to investigate the grain size effect on the nanoscale wear process of polycrystalline silicon. We find that for a constant indentation depth, both the average normal force and friction force are much larger for single-crystalline silicon compared to polycrystalline silicon. It is also found that, for the polycrystalline substrates, both the average normal force and friction force increase with increasing grain size. However, the friction coefficient decreases with increasing grain size, and is the smallest for single-crystalline silicon. We also find that the quantity of wear atoms increases nonlinearly with the average normal load, inconsistent with Archard’s law. The quantity of wear atoms is smaller for polycrystalline substrates with a larger average grain size. The grain size effect in the nanoscale wear can be attributed to the fact that grain boundaries contribute to the plastic deformation of polycrystalline silicon.

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Section: Introductionmentioning

confidence: 99%

Molecular Dynamics Simulation of Nanoscale Abrasive Wear of Polycrystalline Silicon

Zhu

Gong

2018

Crystals

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“…More recently, a detailed study on the wear mechanisms of polycrystalline silicon was performed using the sidewall tribometer [ 168 ]. During the running in period, the authors suggested that the wear process was dominated by adhesive forces leading to a removal of the monolayer coating and the native silicon oxide layer.…”

Section: Materials In Microtribologymentioning

confidence: 99%

Scaling Effects on Materials Tribology: From Macro to Micro Scale

Stoyanov

Chromik

2017

Materials

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The tribological study of materials inherently involves the interaction of surface asperities at the micro to nanoscopic length scales. This is the case for large scale engineering applications with sliding contacts, where the real area of contact is made up of small contacting asperities that make up only a fraction of the apparent area of contact. This is why researchers have sought to create idealized experiments of single asperity contacts in the field of nanotribology. At the same time, small scale engineering structures known as micro- and nano-electromechanical systems (MEMS and NEMS) have been developed, where the apparent area of contact approaches the length scale of the asperities, meaning the real area of contact for these devices may be only a few asperities. This is essentially the field of microtribology, where the contact size and/or forces involved have pushed the nature of the interaction between two surfaces towards the regime where the scale of the interaction approaches that of the natural length scale of the features on the surface. This paper provides a review of microtribology with the purpose to understand how tribological processes are different at the smaller length scales compared to macrotribology. Studies of the interfacial phenomena at the macroscopic length scales (e.g., using in situ tribometry) will be discussed and correlated with new findings and methodologies at the micro-length scale.

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“…The variation of sliding velocity is complex because the mechanism of wear include deformation and interfacial components, transfer also play an important role. For these reasons, no unique trend between wear rate and sliding velocity is to be expected and experiments show, that wear rate/sliding velocity relationships exhibiting maxima, minima or little variation can all be obtained, depending on the materials involved and the precise conditions of sliding imposed [22][23][24][25][26][27][28][29][30].…”

Section: Effect Of Sliding Velocitymentioning

confidence: 99%

Oil Dispersed Polymers Characteristics under External Voltage, Tribological and Corrosion Variables

Sa¹,

Abo‐Dief²,

At³

2017

J Appl Mech Eng

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The present work illustrated the effect of three types of oil-dispersed polymers; low-density polyethylene (LDPE), high-density polyethylene (HDPE) and Polysulphide rubber (PSR) on the abrasive sliding wear of stainless steel. Both friction coefficient and wear scar diameter obtained at various applied external voltage, and polymers weight percentage at 0.5 m/s sliding velocity, 20°C and 5N applied load. The samples immersed in H 2 SO 4 medium at test period ranges from 10 to 50 days. The effect of the corrosion medium carried out and investigated at various values of the external voltages. The wear resistance related to the total mass loss measured and the worn surfaces analyzed by optical microscope. The application of external voltage increases both friction coefficient and wear scar diameter. At various applied external voltage and polymer contents, the wear scar diameter and friction coefficient trends of PSR has a lower values followed by both LDPE and HDPE trends respectively. Negative applied voltage has lower scar diameter while positive voltages has lower friction coefficients except at -4 Volt.

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Wear mechanisms and friction parameters for sliding wear of micron-scale polysilicon sidewalls

Cited by 15 publications

References 73 publications

Molecular Dynamics Simulation of Nanoscale Abrasive Wear of Polycrystalline Silicon

Molecular Dynamics Simulation of Nanoscale Abrasive Wear of Polycrystalline Silicon

Scaling Effects on Materials Tribology: From Macro to Micro Scale

Oil Dispersed Polymers Characteristics under External Voltage, Tribological and Corrosion Variables

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