2019 Devices for Integrated Circuit (DevIC) 2019
DOI: 10.1109/devic.2019.8783385
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Performance and Opportunities of Gate-All-Around Vertically-Stacked Nanowire Transistors at 3nm Technology Nodes

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Cited by 8 publications
(6 citation statements)
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“…With the shift to extreme ultraviolet (EUV) lithography [59] and gate-all-around FETs [60], the "minimax problem" of maximizing chip yields, minimizing manufacturing costs, and maximizing chip performance has grown increasingly complex. Chiplets [61,62] have emerged as a way to address these issues, while also integrating multiple functions in a single package.…”
Section: Semiconductor Shiftsmentioning
confidence: 99%
“…With the shift to extreme ultraviolet (EUV) lithography [59] and gate-all-around FETs [60], the "minimax problem" of maximizing chip yields, minimizing manufacturing costs, and maximizing chip performance has grown increasingly complex. Chiplets [61,62] have emerged as a way to address these issues, while also integrating multiple functions in a single package.…”
Section: Semiconductor Shiftsmentioning
confidence: 99%
“…GAA NS devices have been accepted as main architecture to continue scaling beyond the reach of their competitors in view of the following three advantages over FinFET [21]- [23]. To begin with, the NS devices have superior gate electrostatic control thanks to their GAA architecture compared to the trigate FinFET.…”
Section: Device Overviewmentioning
confidence: 99%
“…The physical principles of the DG model are classical, and consists of the conservation of charge and momentum, meaning that the conservation of the total electron or hole charge in a volume increases in time only due to entry through its surface via generation process inside the volume. The most important material response functions of the DG model are the equations of state that describe the electron and hole gases as follows: characteristics at V d =0.05 V for a 24 nm twin nanowire structure experimental data (from [3]) [5].…”
Section: Simulation Environmentmentioning
confidence: 99%