Performance advances in interferometric optical profilers for imaging and testing

Schmit, Joanna; Reed, Jason; Novak, Erik; Gimzewski, James K.

doi:10.1088/1464-4258/10/6/064001

Cited by 47 publications

(40 citation statements)

References 39 publications

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“…Noncoherent narrowband sources are recommended. For surface profiling these limitations are irrelevant, as was already proved [88,89], since no deep-layer imaging is involved. For biomedical optics applications the use of infrared light is preferable as it penetrates deeper in tissue [90], which then requires the development of highresolution infrared cameras.…”

Section: Conclusion and Future Trendsmentioning

confidence: 99%

Spatial and temporal coherence effects in interference microscopy and full‐field optical coherence tomography

Abdulhalim

2012

Annalen der Physik

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Low‐coherence optical microscopy or optical coherence microscopy uses light with short coherence length. The well‐known case is: “white‐light interferometry”, which became recently more known as: “optical coherence tomography”. However, when lenses and microscope objectives are used to create interferometric images, in what is known classically as “interference microscopy” or today as “full‐field optical coherence tomography” the spatial coherence starts to play a critical role. In this article the coherence effects in low‐coherence optical microscopy are reviewed. As this technology is becoming increasingly publicized due to its importance in three‐dimensional imaging, particularly of scattering biological media and optical metrology, the understanding of the fundamental physics behind it is essential. The interplay between longitudinal spatial coherence and temporal coherence and the effects associated with them are discussed in detail particularly when high numerical apertures are used. An important conclusion of this study is that a high‐contrast, high‐resolution system for imaging of multilayered samples is the one that uses narrowband illumination and high‐NA objectives with an index‐matching fluid. Such a system, when combined with frequency‐domain operation, can reveal nearly real‐time three‐dimensional images, and is thus competitive with confocal microscopy.

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Section: Conclusion and Future Trendsmentioning

confidence: 99%

Spatial and temporal coherence effects in interference microscopy and full‐field optical coherence tomography

Abdulhalim

2012

Annalen der Physik

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“…Phase shifting and white light interferometry have proved to be a solution suitable for full-field characterization of the dynamic and static responses of cantilever arrays with no constraints in their geometry. [49][50][51][52] However, for sensing applications, the displacement resolution is somewhat limited (above a nanometer), and the acquisition time and image processing exceed tens of seconds for the static information, and tens of minutes for the dynamic data. 52 Laser-Doppler vibrometry possesses high potential for dynamic measurements of cantilever arrays; however, it does not provide information about the static deformation.…”

Section: Introductionmentioning

confidence: 99%

“…[49][50][51][52] However, for sensing applications, the displacement resolution is somewhat limited (above a nanometer), and the acquisition time and image processing exceed tens of seconds for the static information, and tens of minutes for the dynamic data. 52 Laser-Doppler vibrometry possesses high potential for dynamic measurements of cantilever arrays; however, it does not provide information about the static deformation. 53 In this work, we present a simple and robust technique for the optical readout of displacements of cantilever arrays with subnanometer accuracy, with no limitation in the geometry of the arrays and a spatial resolution of few micrometers.…”

Section: Introductionmentioning

confidence: 99%

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

Martínez¹,

Kosaka²,

Tamayo³

et al. 2010

Review of Scientific Instruments

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A nano-cheese-cutter to directly measure interfacial adhesion of freestanding nano-fibers J. Appl. Phys. 111, 024315 (2012) Stabilization and growth of non-native nanocrystals at low and atmospheric pressures J. Chem. Phys. 136, 044703 (2012) Nanoparticle production in arc generated fireballs of granular silicon powder AIP Advances 2, 012126 (2012) Stability and topological transformations of liquid droplets on vapor-liquid-solid nanowires J. Appl. Phys. 111, 024302 (2012) Role of RuO3 for the formation of RuO2 nanorods Appl. Phys. Lett. 100, 033108 (2012) Additional information on Rev. Sci. Instrum. We present an instrument based on the scanning of a laser beam and the measurement of the reflected beam deflection that enables the readout of arrays of nanomechanical systems without limitation in the geometry of the sample, with high sensitivity and a spatial resolution of few micrometers. The measurement of nanoscale deformations on surfaces of cm 2 is performed automatically, with minimal need of user intervention for optical alignment. To exploit the capability of the instrument for high throughput biological and chemical sensing, we have designed and fabricated a two-dimensional array of 128 cantilevers. As a proof of concept, we measure the nanometer-scale bending of the 128 cantilevers, previously coated with a thin gold layer, induced by the adsorption and self-assembly on the gold surface of several self-assembled monolayers. The instrument is able to provide the static and dynamic responses of cantilevers with subnanometer resolution and at a rate of up to ten cantilevers per second. The instrumentation and the fabricated chip enable applications for the analysis of complex biological systems and for artificial olfaction.

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“…The microscope system used to measure the MOEMS was a Zygo NewView 7200 interference microscope using scanning white light interferometry [6] and equipped with 10× and 50× Mirau interference objectives, a 150 µm piezoelectric vertical stage and a digital B&W camera.…”

Section: Zygo Measurement System and Data Analysismentioning

confidence: 99%

“…We have previously demonstrated the use of coherence scanning interferometry (CSI) in the characterization of the topography of a miniaturised MOEMS FT spectrometer [4] and of DOEs made using photoablation of an intermediate resist layer [5]. The particularity of CSI is that it allows deep characterisation (< 150 µm) with nm axial sensitivity on smooth surfaces over wide elds (mm) [6]. The main defects appearing in the presently described MOEMS projector that needed to be understood and controlled were alignment errors, axially between the surfaces of the laser emitting sources and the Fresnel collimating lenses and laterally concerning the dierent photomasks used to produce the DOE structures.…”

Section: Introductionmentioning

confidence: 99%

Parallel Optical Profilometry Assisted Conception of an Opto-Electronic Illuminator Using a VCSEL and Diffractive Optics

2014

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Micro-opto electromechanical systems are of growing importance in the development of new miniaturised projection, imaging and detection technologies. Because of the increasing complexity of construction involving layers of microelectronics, optoelectronics and micro-optics, dierent types of defects can appear that need to be understood and controlled in order for the miniaturised system to operate correctly within the given specications. We have recently developed a miniaturised structured light (micro-opto electromechanical systems) projector consisting of a multilayer sandwich made of a rst layer of 3 bars of 12 VCSEL laser sources, a second layer of Fresnel collimating lenses (diractive optical elements) and a third layer of Fourier diractive optical elements to produce the structured light pattern. The main defects that had to be controlled were alignment errors, the rst ones being between the emitting surface and the collimating lenses and the second one concerning the lateral alignment of the photomasks used to produce the 4 levels of the Fourier elements. We demonstrate how 3D geometrical shape characterization of the emitting structures and diractive optical elements surface structures using coherence scanning interferometry played a major role in the conception and fabrication of a prototype micro-optoelectromechanical projection system to understand the source of the alignment errors and to minimise them.

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Performance advances in interferometric optical profilers for imaging and testing

Cited by 47 publications

References 39 publications

Spatial and temporal coherence effects in interference microscopy and full‐field optical coherence tomography

Spatial and temporal coherence effects in interference microscopy and full‐field optical coherence tomography

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

Parallel Optical Profilometry Assisted Conception of an Opto-Electronic Illuminator Using a VCSEL and Diffractive Optics

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