Abstract:Micro-opto electromechanical systems are of growing importance in the development of new miniaturised projection, imaging and detection technologies. Because of the increasing complexity of construction involving layers of microelectronics, optoelectronics and micro-optics, dierent types of defects can appear that need to be understood and controlled in order for the miniaturised system to operate correctly within the given specications. We have recently developed a miniaturised structured light (micro-opto el… Show more
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