2015
DOI: 10.1063/1.4920998
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Peculiarities of measuring ion energy distribution in plasma with a retarding field analyzer

Abstract: Presented are the results from tailoring the retarding field energy analyzer to measure the degree of charge compensation and regular patterns in the separations of ions of different mass, with the multicomponent ion flow spreading out in the plasma-optical mass separator model.

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Cited by 11 publications
(4 citation statements)
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“…Retarding field energy analysers are an indirect non perturbing method, which analyses the particles emitted radially from the beam plasma, and allows to infer the plasma parameters from the energy distribution function of ions and electrons. One of the first examples is described in [155]; the technique is now commonly adopted for measuring the beam compensation degree, often in combination with other techniques [156][157][158]. For instance [159], describes the preparation of the retarding field energy analyser for NIO1; the system was applied to the investigation both of argon ions and electrons in a sputtering magnetron plasma showing the importance of numerical models for the interpretation of experimental results, particularly in collisional regimes, the system will be soon installed in NIO1.…”
Section: Measurement Of Beam Space Charge Compensation or Beam Plasmamentioning
confidence: 99%
“…Retarding field energy analysers are an indirect non perturbing method, which analyses the particles emitted radially from the beam plasma, and allows to infer the plasma parameters from the energy distribution function of ions and electrons. One of the first examples is described in [155]; the technique is now commonly adopted for measuring the beam compensation degree, often in combination with other techniques [156][157][158]. For instance [159], describes the preparation of the retarding field energy analyser for NIO1; the system was applied to the investigation both of argon ions and electrons in a sputtering magnetron plasma showing the importance of numerical models for the interpretation of experimental results, particularly in collisional regimes, the system will be soon installed in NIO1.…”
Section: Measurement Of Beam Space Charge Compensation or Beam Plasmamentioning
confidence: 99%
“…Попытки увидеть с помощью пояса Роговского возможные предвестники тлеющего разряда не привели к желаемому результату, поэтому мы решили использовать в качестве индикатора зажигания разряда ток ионов, покидающих УАС через кольцевое отверстие в катоде. В качестве датчика ионного тока использовался коллектор энергоанализатора с задерживающим потенциалом (RFA) с системой управления и регистрации, способной отслеживать сигнал в течение 100 s [11].…”
unclassified
“…Since the attempts at identifying probable precursors of a glow discharge with a Rogowski coil failed, we decided to use the current of ions leaving the AAL through a circular aperture in the cathode as an indicator of discharge ignition. The collector of a retarding field analyzer (RFA) with a control and measurement system capable of monitoring the signal for 100 s [11] was used as an ion current sensor.…”
mentioning
confidence: 99%