2015
DOI: 10.1016/j.ceramint.2015.07.084
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Patterning of lithium lanthanum titanium oxide films by soft lithography as electrolyte for all-solid-state Li-ion batteries

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Cited by 3 publications
(3 citation statements)
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“…This method is a kind of technology using a series of produce procedure to deprive specific section on target surfaces, forming micro‐/nanohierarchical structures. The lithography includes photolithography, electron‐beam (e‐beam) lithography, X‐ray lithography, nanoimprint lithography, and colloidal lithography (soft lithography) . Traditional lithography will choose a flat plate as mask surface.…”
Section: Fabrication Of Superhydrophobic Surfacementioning
confidence: 99%
See 1 more Smart Citation
“…This method is a kind of technology using a series of produce procedure to deprive specific section on target surfaces, forming micro‐/nanohierarchical structures. The lithography includes photolithography, electron‐beam (e‐beam) lithography, X‐ray lithography, nanoimprint lithography, and colloidal lithography (soft lithography) . Traditional lithography will choose a flat plate as mask surface.…”
Section: Fabrication Of Superhydrophobic Surfacementioning
confidence: 99%
“…Sol–gel method is always cooperated to coating and deposition process . Sol–gel synthesis in combination with micromolding as an example of a soft lithographic technique was used to prepare micropatterned films of the Li‐ion conducting perovskite‐type phase with nominal composition Li 0.29 La 0.57 TiO 3 on silicon substrate . Xue et al used sol–gel method to obtain a superhydrophobic and superoleophilic textile for the purpose of achieving fast oil–water separation.…”
Section: Fabrication Of Superhydrophobic Surfacementioning
confidence: 99%
“…8 There are two main approaches to obtain patterned surfaces: top-down and bottom-up methods. 9 The top-down techniques refer to physical or combined physicalchemical modification of a surface; well-known examples are photolithography, 10,11 soft lithography, [12][13][14] electron beam lithography 15 or etching. 16 The bottom-up approach, more recent in time and involving self-assembly, dewetting or a combination of both, has been widely explored due to its low cost and no involvement of large-scale apparatus.…”
Section: Introductionmentioning
confidence: 99%