2002
DOI: 10.1021/nl025679e
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Patterning and Visualizing Self-Assembled Monolayers with Low-Energy Electrons

Abstract: We show that a trimethylsilyl (TMS) self-assembled monolayer on a silicon surface is a self-developing positive resist, which can be patterned with low energy electrons. Contact angle measurements have been used to quantify the efficiency of the exposure as a function of exposure dose and acceleration voltage. Ash formation was negligible, as a 3-aminopropyltriethoxysilane (APTES) self-assembled monolayer could be formed on the patterned area without an intermediate development stage. APTES/TMS patterns have b… Show more

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Cited by 41 publications
(41 citation statements)
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References 21 publications
(28 reference statements)
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“…To conclude this section, we note that VC Type 1 due to charging is minimized in our experiment by the primary electron penetration depth of 1.5 μm at 10 keV [32,33] being signifi cantly larger than the oxide thickness of 800 nm. Most of the primary electrons pass through the oxide into the silicon gate and are removed by the gate bias circuit.…”
Section: Nano Researchmentioning
confidence: 78%
“…To conclude this section, we note that VC Type 1 due to charging is minimized in our experiment by the primary electron penetration depth of 1.5 μm at 10 keV [32,33] being signifi cantly larger than the oxide thickness of 800 nm. Most of the primary electrons pass through the oxide into the silicon gate and are removed by the gate bias circuit.…”
Section: Nano Researchmentioning
confidence: 78%
“…Other studies employed the deposition of aminosilanes through a poly(methylmethacrylate) (PMMA) mask or an unfunctionalized SAM that was patterned by electron beam lithography. [237][238][239] In this way colloidal particles and carbon nanotubes were deposited selectively on the amine-modified parts of the substrate. Recently, electron beam irradiation was used to induce chemical transformations in monolayers.…”
Section: Electron Beam Lithographymentioning
confidence: 99%
“…However, this problem is readily overcome with the use of low energy electrons and even individual CNTs can be imaged via SEM. [93,[101][102][103] The work of Zhang et al [93] highlights that SEM imaging of individual nanotubes can still be challenging with routine approaches not able to image nanotubes and coupling of SEM imaging with another technique (in this case Raman microscopy) is a powerful approach.…”
Section: Atomic Force and Scanning Electron Microscopy Analysismentioning
confidence: 99%