1991
DOI: 10.1049/el:19910689
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Passive coupling of InGaAsP/InP laser array and singlemode fibres using silicon waferboard

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Cited by 104 publications
(8 citation statements)
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“…The feasibility of using microreplication technology in a microelectromechanical system (MEMS) was demonstrated by fabricating a prototype polymeric motherboard for an optical receiver module. Similar motherboard designs have been realized in silicon [5][6][7].…”
Section: Demonstration Of An Optical Receivermentioning
confidence: 95%
“…The feasibility of using microreplication technology in a microelectromechanical system (MEMS) was demonstrated by fabricating a prototype polymeric motherboard for an optical receiver module. Similar motherboard designs have been realized in silicon [5][6][7].…”
Section: Demonstration Of An Optical Receivermentioning
confidence: 95%
“…There have been many reports of passive alignment technologies for optical waveguide devices including the mechanical alignment method, [16][17][18][19][20][21][22][23][24] index alignment method, [25][26][27] and solder bump self-alignment method. 28) They mainly focused on the connections between the optical waveguide chip and fibers; in other words, the multi-chip integration of many optical waveguide chips with a pluggable connection was beyond the scope of these studies.…”
Section: Introductionmentioning
confidence: 99%
“…The cost-effective monolithic integration of photonic systems still faces extensive challenges [3]. Hybrid integration of InGaAsP/InP sources and silica fibers using passive alignment silicon waferboard is suggested and demonstrated for producing optical communication modules [4], [5]. Research work has led to the demonstration and utilization of planar lightwave circuits (PLCs) [6]- [8].…”
mentioning
confidence: 99%
“…The silicon micromachining technologies that are used in the microelectronics industry are widely applied to tool silicon precision substrates for passive alignment fiber optic subassemblies. The accuracy of silicon substrates is adequate for the passive alignment of single mode photonic devices and components [4], [15], [16]. Another possible technology for producing high-precision structures with high aspect ratios and great structural heights with tight tolerances is lithography, electroplating, and molding (LIGA) [17].…”
mentioning
confidence: 99%