2017 32nd Symposium on Microelectronics Technology and Devices (SBMicro) 2017
DOI: 10.1109/sbmicro.2017.8112994
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Passivation analysis of the Emitter and selective back surface field of silicon solar cells

Abstract: In this work the high-quality passivation of p-type Si solar cells with a boron-aluminum selective back surface field (BSF) and dry thermal SiO 2 layers on both surfaces is analyzed comparing the internal quantum efficiency (IQE) and the current-voltage parameters. This structure may be a viable substitute for the industry's standard solar cell, which has to be reconsidered when faced with the bowing problem. We observed that increasing oxidation temperature decreases IQE for short wavelengths (400 nm), while … Show more

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Cited by 5 publications
(3 citation statements)
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“…Furthermore, it is possible to passivate both p-and n-cSi wafers with SiO x making it a versatile film to be utilised for both back and front surfaces. 61 This permits a single oxidation step to passivate both sides of the wafer, which reduces fabrication cost. These fabricated results have demonstrated the applicability of MoO x and TiO x as hole-and electron-selective contacts for DASH solar cells.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Furthermore, it is possible to passivate both p-and n-cSi wafers with SiO x making it a versatile film to be utilised for both back and front surfaces. 61 This permits a single oxidation step to passivate both sides of the wafer, which reduces fabrication cost. These fabricated results have demonstrated the applicability of MoO x and TiO x as hole-and electron-selective contacts for DASH solar cells.…”
Section: Introductionmentioning
confidence: 99%
“…Thermally grown SiO x provides low interface state density, 58 excellent interface passivation with cSi wafer, 59 impressive charge carrier tunnelling properties, 60 and stoichiometry close to SiO 2 59 that could be suitable for SHJ solar cell applications. Furthermore, it is possible to passivate both p‐ and n‐cSi wafers with SiO x making it a versatile film to be utilised for both back and front surfaces 61 . This permits a single oxidation step to passivate both sides of the wafer, which reduces fabrication cost.…”
Section: Introductionmentioning
confidence: 99%
“…É possível realizar a passivação de ambas superfícies em uma única etapa térmica com o crescimento de dióxido de silício por meio de uma oxidação seca (Bonilla et al, 2017). Foi comprovado que este dielétrico pode ser eficaz na passivação de regiões altamente dopadas n + e p + (Razera et al, 2017), , (Chen et al, 2017). Porém, na oxidação térmica seca a taxa de crescimento é maior na região dopada com fósforo do que na região dopada com boro (Ho e Plummer, 1979).…”
Section: Introductionunclassified