2020
DOI: 10.1038/s41378-020-00186-2
|View full text |Cite
|
Sign up to set email alerts
|

Parylene photonics: a flexible, broadband optical waveguide platform with integrated micromirrors for biointerfaces

Abstract: Targeted light delivery into biological tissue is needed in applications such as optogenetic stimulation of the brain and in vivo functional or structural imaging of tissue. These applications require very compact, soft, and flexible implants that minimize damage to the tissue. Here, we demonstrate a novel implantable photonic platform based on a high-density, flexible array of ultracompact (30 μm × 5 μm), low-loss (3.2 dB/cm at λ = 680 nm, 4.1 dB/cm at λ = 633 nm, 4.9 dB/cm at λ = 532 nm, 6.1 dB/cm at λ = 450… Show more

Help me understand this report
View preprint versions

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

0
17
0

Year Published

2020
2020
2024
2024

Publication Types

Select...
8
1
1

Relationship

0
10

Authors

Journals

citations
Cited by 36 publications
(24 citation statements)
references
References 64 publications
0
17
0
Order By: Relevance
“…Lastly, it should also be noted that the electrical signals recorded by these systems are prone to stimulation artifacts as a result of photovoltaic effects occurring during the high-intensity illumination of the incorporated recording electrodes [ 126 , 127 ]. However, to reduce this effect, designs including side-emitting waveguides, employing integrated micromirrors [ 128 ] or grating couplers [ 129 ], and shielded recording sites [ 54 ] have been presented.…”
Section: Neural Tissue Illuminationmentioning
confidence: 99%
“…Lastly, it should also be noted that the electrical signals recorded by these systems are prone to stimulation artifacts as a result of photovoltaic effects occurring during the high-intensity illumination of the incorporated recording electrodes [ 126 , 127 ]. However, to reduce this effect, designs including side-emitting waveguides, employing integrated micromirrors [ 128 ] or grating couplers [ 129 ], and shielded recording sites [ 54 ] have been presented.…”
Section: Neural Tissue Illuminationmentioning
confidence: 99%
“…Parylene C has received considerable research attention because of its biocompatibility, chemical inertness, and low moisture permeability, which result in it having suitable barrier properties [24][25][26][27][28]. This material has been used in implantable medical devices, such as implantable nerve recording electrodes [29,30], implantable biomedical chips [31,32], drug delivery systems [32,33], spinal cord stimulators [34,35], and cardiac rhythm devices.…”
Section: Introductionmentioning
confidence: 99%
“…To realize electrical actuation, the MEMS micromirror system consists of two electrodes separated by an isolation layer. The isolation layer mostly comprises silicon dioxide (SiO 2 ), which is the first choice due to its benefits such as providing good insulation between two conducting layers, easy availability, low cost, transparency and high mechanical flexibility [13][14][15][16][17]. The actual fabricated structure of the MEMS-based micromirrors is shown in Figure 3.…”
Section: Introductionmentioning
confidence: 99%