Parylene-based integrated wireless single-channel neurostimulator

Li, Wen; Rodger, Damien C.; Pinto, A.; Meng, Ellis; Weiland, James D.; Humayun, Mark S.; Ye, Tai

doi:10.1016/j.sna.2010.03.003

Cited by 41 publications

(34 citation statements)

References 11 publications

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“…Additionally, free film Parylene devices can integrate transducer, electrical components (e.g. coils, discrete electronics, and chips), and flexible electrical connections into a single, encapsulated structure, minimizing unnecessary complexity.…”

Section: Fabrication Techniquesmentioning

confidence: 99%

Micromachining of Parylene C for bioMEMS

Kim

Meng

2015

Polym. Adv. Technol.

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164

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Recent advances in the micromachining of poly(p-xylylenes), commercially known as Parylenes, have enabled the development of novel structures and devices for microelectromechanical systems (MEMS). In particular, Parylene C (poly[chloro-p-xylylene]) has been explored extensively for biomedical applications of MEMS given its compatibility with micromachining processes, proven biocompatibility, and many advantageous properties including its chemical inertness, optical transparency, flexibility, and mechanical strength. Here we present a review of often used and recently developed micromachining process for Parylene C, as well as a high-level overview of state-of-the-art Parylene hybrid and free film devices for biomedical MEMS (bioMEMS) applications, including a discussion on its challenges and potential as a MEMS material.

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Section: Fabrication Techniquesmentioning

confidence: 99%

Micromachining of Parylene C for bioMEMS

Kim

Meng

2015

Polym. Adv. Technol.

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164

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“…Parylene-C has been widely adopted in various implantable biomedical devices, including intraocular implantations (Chen et al 2008;Li et al 2011). Its biocompatibility has been demonstrated and no immune or inflammatory response was reported.…”

Section: Feasibility Of Mspm As a Replacement For Bruch's Membranementioning

confidence: 99%

“…As a USP class VI biocompatible polymer, parylene-C has found numerous biomedical applications (Chen et al 2008;Xu et al 2010;Li et al 2011). Due to its good mechanical strength, biostability, barrier properties and chemical inertness, parylene-C is usually adopted in implantable devices which require isolation from moisture, chemicals and corrosive body fluids and tissues (Chen et al 2008;Li et al 2011). In this work, however, we found that when the thickness of parylene-C is reduced to the submicron range, it becomes semipermeable to molecules with certain molecular weights (MW), which makes it suitable as an artificial Bruch's membrane.…”

Section: Introductionmentioning

confidence: 99%

Mesh-supported submicron parylene-C membranes for culturing retinal pigment epithelial cells

Lü

Zhu

Hinton

et al. 2012

Biomed Microdevices

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128

122

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In this work, a mesh-supported submicron parylene-C membrane (MSPM) is proposed as an artificial Bruch's membrane for the therapy of age-related macular degeneration (AMD). Any artificial Bruch's membrane must first satisfy two important requirements. First, it should be as permeable as healthy human Bruch's membrane to support nutrients transportation. Secondly, it should be able to support the adherence and proliferation of retinal pigment epithelial (RPE) cells with in vivo-like morphologies and functions. Although parylene-C is widely used as a barrier layer in many biomedical applications, it is found that parylene-C membranes with submicron thickness are semipermeable to macromolecules. We first measure the permeability of submicron parylene-C and find that 0.15-0.30 μm parylene-C has similar permeability to healthy human Bruch's membranes. Blind-well perfusion cell viability experiments further demonstrate that nutrients and macromolecules can diffuse across 0.30 μm parylene-C to nourish the cells. A mesh-supported submicron parylene-C membrane (MSPM) structure is design to enhance the mechanical strength of the substrate. In vitro cells culture on the MSPM (with 0.30 μm ultrathin parylene-C) shows that H9-RPE cells are able to adhere, proliferate, form epithelial monolayer with tight intracellular junctions, and become well-polarized with microvilli, which exhibit similar characteristics to RPE cells in vivo. These studies have demonstrated the potential of the MSPM as an artificial Bruch's membrane for RPE cell transplantation.

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“…Initially used as an encapsulation coating to protect implantable devices [6][7][8], Parylene is now a commonly used structural material in surface micromachining that can be selectively shaped using standard lithographic processes in combination with oxygen plasma-based removal [9]. More recently, the ability to form 3D Parylene structures have also contributed to the development of novel sensors [10,11], microfluidics [12][13][14], and implantable devices [15,16].…”

Section: Introductionmentioning

confidence: 99%

Formation of three-dimensional Parylene C structures via thermoforming

Kim

Chen

Gupta

et al. 2014

J. Micromech. Microeng.

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The thermoplastic nature of Parylene C is leveraged to enable the formation of three-dimensional structures using a thermal forming (thermoforming) technique. Thermoforming involves the heating of Parylene films above its glass transition temperature while they are physically confined in the final desired conformation. Micro and macro scale three-dimensional structures composed of Parylene thin films were developed using the thermoforming process, and the resulting chemical and mechanical changes to the films were characterized. No large changes to the surface and bulk chemistries of the polymer were observed following the thermoforming process conducted in vacuum. Heat treated structures exhibited increased stiffness by a maximum of 37% depending on the treatment temperature, due to an increase in crystallinity of the Parylene polymer. This study revealed important property changes resulting from the process, namely (1) the development of high strains in thermoformed areas of small radii of curvature (30-90 µm) and (2) ∼1.5% bulk material shrinkage in thermoformed multilayered Parylene-Parylene and Parylene-metal-Parylene films. Thermoforming is a simple process whereby three-dimensional structures can be achieved from Parylene C-based thin film structures with tunable mechanical properties as a function of treatment temperature.

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Parylene-based integrated wireless single-channel neurostimulator

Cited by 41 publications

References 11 publications

Micromachining of Parylene C for bioMEMS

Micromachining of Parylene C for bioMEMS

Mesh-supported submicron parylene-C membranes for culturing retinal pigment epithelial cells

Formation of three-dimensional Parylene C structures via thermoforming

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