Particle formation during deposition of SiO<i> <sub>x</sub> </i> nanostructured thin films by atmospheric pressure plasma jet

Ussenov, Y. A.; Hansen, Luka; Krüger, Thomas; Рамазанов, Т. С.; Kersten, Holger

doi:10.35848/1347-4065/ab72ca

Cited by 16 publications

(7 citation statements)

References 54 publications

(71 reference statements)

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“…The approach benefits from the other unique assets of ALD, namely, conformality, density, and compactness of the deposited films, and high material quality at low deposition temperature. This is important when comparing with other deposition systems based on spray coating or plasma aerosol jets that are based on CVD reactions, [ 54 ] which yield less homogeneous thin films. Figure 4e shows an image of our 3D printed SALD pen installed in a 3D table, used in this case to directly print a circle of ZnO without any previous patterning step.…”

Section: Figurementioning

confidence: 99%

Gas‐Phase 3D Printing of Functional Materials

Huerta

Nguyễn

Sekkat

et al. 2020

Adv Materials Technologies

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Furthermore lithography and patterning are often performed in cleanrooms, thus adding to the cost of the final devices. In this context, there have been much progress in bringing the resolution of inkjet printing down to the micrometer level. [6] And other new bottom-up strategies are being developed, for example based on microfluidics and interfacial convective assembly. [7,8] Another new approach to so-called area-selective deposition (ASD) has been developed in the last years in the field of atomic layer deposition (ALD). [3,9] In ALD, solid-gas, surface-limited, selfterminating reactions take place. [10-12] This results in very compact and continuous thin films with a sub-nanometer thickness control and unique conformality, key assets for engineering the interfaces and surfaces of different functional materials and devices. [13-16] Given the surface-limited nature of ALD, several strategies can be implemented to control the reactivity of ALD precursors toward different surfaces to generate selectivity and result in ASD. These involve the use of a substrate with different materials (growth inhibition or delay taking place in one of them) or the use of self-assembled monolayers to block the growth in certain parts of the surface, as recently reviewed by Mackus et al. [17] While these approaches are very appealing and have proven to be efficient, there is still the need to have a surface with different materials, and in most cases a prepatterning step is necessary. Also, some of the ASD approaches require intermediate etching steps. [18] Finally, these approaches suffer from the inherent low deposition rate of ALD and the use of expensive vacuum equipment. In the last years, spatial ALD (SALD) has established itself as a high-throughput, low-cost alternative to conventional ALD. SALD is based on the spatial separation of precursors, as opposed to the sequential (temporal) separation in ALD. [19,20] Thus, precursors are continuously injected in different locations, which are spatially separated by an inert gas region. As the sample is exposed to the different regions, the standard ALD cycle is reproduced. Because no purge steps are needed, SALD can be up to two orders of magnitude faster than ALD. [21,22] In addition, SALD can be performed at atmospheric pressure (AP-SALD), thus resulting more convenient for scalingup than vacuum-based ALD. [23-25] But because SALD is based on the same surface-limited, self-terminating chemistry than Spatial atomic layer deposition (SALD) is a recent approach 100 times faster than conventional atomic layer deposition (ALD), even at atmospheric pressure. Previous works exploited these assets focussing on high-rate, large-area deposition for scaling-up into mass production. Conversely, this work shows that SALD indeed represents an ideal platform for area-selective deposition of functional materials by proper design and miniaturization of close-proximity SALD heads. In particular, the potential offered by 3D printing is used to fabricate low-cost customized close-proximity heads, w...

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Section: Figurementioning

confidence: 99%

Gas‐Phase 3D Printing of Functional Materials

Huerta

Nguyễn

Sekkat

et al. 2020

Adv Materials Technologies

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“…The SiO 2 ultra-thin layer (of 10-20 nm) was deposited on the top of samples using the commercial atmospheric pressure plasma jet PFW 10 (Plasmatreat GmbH, Steinhagen, Germany) and hexamethyldisiloxane www.advmattechnol.de (HMDSO) as precursor similar as in other works. [63][64][65][66] The jet parameters were 300 V primary voltage, 19 kHz discharge frequency, and a plasma cycle time of 100%, which corresponds to a duty cycle of 50%. As working gas, 30 slm pressured air was used, and 1 slm N 2 (Air Liquide, 99.995% purity) was bubbled through the liquid HMDSO (Merck KGaA, GC, area% ≥ 98.5 area%).…”

Section: Methodsmentioning

confidence: 99%

Improved Long‐Term Stability and Reduced Humidity Effect in Gas Sensing: SiO₂ Ultra‐Thin Layered ZnO Columnar Films

Postica

Lupan

Gapeeva

et al. 2021

Adv Materials Technologies

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The undoped and metal‐doped zinc oxide columnar films (ZnO:Sn, ZnO:Fe, ZnO:Ag, and ZnO:Cu) are covered with an ultra‐thin layer of SiO2 (10–20 nm). The electrical, UV, and volatile organic compounds (VOCs) sensing properties are evaluated under different ambient conditions for ≈7 months to investigate the impact of the top SiO2‐layer on the long‐term stability of samples. The obtained results show a high immunity of sensing properties of SiO2‐coated samples to humidity. Furthermore, gas sensing measurements show that the loss in response after 203 days is significantly lower for coated samples indicating higher stability of sensing performance. For ZnO:Fe the gas response is reduced by about 90% after 203 days, but for SiO2‐coated ZnO:Fe columnar films the gas response is slightly reduced by only 38%. The density functional theory (DFT) calculations show that water species bind strongly with the surface SiO2 layer atoms with a −0.129 e− charge transfer, which is, much higher compared to the interaction with ethanol and acetone. Calculations show strong binding of water species on the SiO2 layer indicating preferential absorption of water molecules on SiO2. The obtained results demonstrate an important role of the top SiO2 ultra‐thin layer in order to produce humidity‐tolerant sensitive devices.

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“…VBD consists of two parallel dielectric plates with electrodes mounted externally or two electrodes on one side of the dielectric. SBD device has a dielectric surface with a small but elongated electrode on one side of the dielectric and a metallic electrode coated on the opposite side [5,6]. Such devices are advantageous for industrial use because vacuum equipment can be avoided and DBD-based devices operate in the atmospheric pressure range.…”

Section: Introductionmentioning

confidence: 99%

Effect of laminar and turbulent flow on the collective motion of plasma microdischarges at atmospheric pressure

Ashirbek¹,

Usenov²,

Dosbolaev³

et al. 2022

phst

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Dielectric barrier discharge (DBD) is used for many important applications in various sectors of science and technology. For example, for ozone generation, surface modification of polymers, in plasma medicine, and for decomposition of heavy volatile organic compounds. Nowadays, one of the actual problems is getting of uniformity of discharge distribution for high quality treatment of materials surfaces. To achieve uniform distribution of the discharge, several methods are available, one is to use different types of noble gases, and another is to use AC power supply with frequency varied in wide range. But besides this, another of the potential methods for obtaining a uniformly distributed discharge is to blow through the discharge gap flow of air. This method was used in this paper to conduct experiments which consisted of oscilloscoping voltage and current values, high-speed imaging, also gas flow simulation for comparison with the experiments. The obtained results show the dynamics of microdischarge motion in laminar and turbulent flow regimes, which supported by flow simulation.

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Particle formation during deposition of SiO _x nanostructured thin films by atmospheric pressure plasma jet

Cited by 16 publications

References 54 publications

Gas‐Phase 3D Printing of Functional Materials

Gas‐Phase 3D Printing of Functional Materials

Improved Long‐Term Stability and Reduced Humidity Effect in Gas Sensing: SiO₂ Ultra‐Thin Layered ZnO Columnar Films

Effect of laminar and turbulent flow on the collective motion of plasma microdischarges at atmospheric pressure

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Particle formation during deposition of SiO x nanostructured thin films by atmospheric pressure plasma jet

Cited by 16 publications

References 54 publications

Gas‐Phase 3D Printing of Functional Materials

Gas‐Phase 3D Printing of Functional Materials

Improved Long‐Term Stability and Reduced Humidity Effect in Gas Sensing: SiO2 Ultra‐Thin Layered ZnO Columnar Films

Effect of laminar and turbulent flow on the collective motion of plasma microdischarges at atmospheric pressure

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Particle formation during deposition of SiO _x nanostructured thin films by atmospheric pressure plasma jet

Improved Long‐Term Stability and Reduced Humidity Effect in Gas Sensing: SiO₂ Ultra‐Thin Layered ZnO Columnar Films