Package Level Integration of Silicon Microfabricated Reactors to Form a Miniature Reactor Test System

Abstract

A method for packaging microfabricated reactors is described that allows for the creation of parallel arrays of operating devices for scalsup purposes.As a packaging demonstration, these microreactors are being coupled with microvalves and MEMS mass flow controllers to form a miniature microreactor test station. A novel method based on Known Good Die technology is used for the electrical and fluidic interfaces to the microreactors.The microfluidic components are mounted on standard circuit boards that have the monitoring and control circuitry along with fluidic connections. The boards are housed in a standard 6U CompactPCI chassis utilizing its backplane for the electrical connections between boards. This system will be the first demonstration of a scalable, parallel microreactor array that integrates reactors with other microfluidic devices and the electronic circuitry needed for monitoring and control.

The Impact of MEMS on the Chemical and Pharmaeutical Industries

“…To address issues in microreactor scale-up, MIT and DuPont have begun construction of a multiple reactor test station for gasphase systems [32]. The fabrication of this system serves as a test case for the development of more complex microreactor based systems.…”