2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest 2000
DOI: 10.31438/trf.hh2000.26
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The Impact of MEMS on the Chemical and Pharmaeutical Industries

Abstract: Microfabrication techniques are increasingly used in different fields of chemistry to realize structures with capabilities exceeding those of conventional macroscopic systems. In addition to already demonstrated analysis applications (j.tTAS), MEMS microreactor systems are expected to have a number of advantages for chemical synthesis, chemical kinetics studies, and process development. Current efforts in microfabrication and application of microchemical systems are reviewed.Chemical processing advantages from… Show more

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Cited by 3 publications
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“…Microscale devices for chemical production are an attractive option whenever small quantities of specialty materials must be produced or highly degradable materials must be produced on demand. 7 This technology has a great deal of potential in the pharmaceutical and biomedical fields for specific applications in which device size, product purity, and efficiency are critical factors. Microscale devices that can be implanted within the human body to perform specific tasks, such as microdialysis, represent an exciting application of this technology.…”
Section: Introductionmentioning
confidence: 99%
“…Microscale devices for chemical production are an attractive option whenever small quantities of specialty materials must be produced or highly degradable materials must be produced on demand. 7 This technology has a great deal of potential in the pharmaceutical and biomedical fields for specific applications in which device size, product purity, and efficiency are critical factors. Microscale devices that can be implanted within the human body to perform specific tasks, such as microdialysis, represent an exciting application of this technology.…”
Section: Introductionmentioning
confidence: 99%