Abstract:Influences of the p + layer, i.e., deposition condition, post-deposition annealing, thin film deposition sequence, internal light reflection, electrode film quality, and SiNx chamber pretreatment on the a-Si:H solar cell performance have been studied. The conversion efficiency is improved using the pin stack structure with a high final annealing temperature and a high reflective bottom electrode due to the decrease of the contact resistance, the reduction of defects in the film, the increase of the hole transp… Show more
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