P‐56: Novel 3‐Mask TFT Technology with ITO Lift‐Off Enhancement Process for First Worldwide 28” HVA AM‐LCD TV

Abstract

A 3‐masks technology has been developed by a new mask design named large area half‐tone mask (LA‐HTM). The risk points of the LA‐HTM design were discussed and solved. By using this technology, the transmittance of LCD panel was improved and the stripping efficiency in the peripheral area was enhanced.

P‐83: The Development of Mask‐Reduction Technology in LTPS LCD

“…Based on literature research, we have identified two possible process routes, as shown in Figure 10. to achieve the merger of the ITO2 process and the PV2 process [4]. Halftone mask technology is also required in scheme 2, but its biggest difficulty lies in the treatment and stripping processes of photoresist in the lift-off technology, which needs to ensure the accuracy and edge smoothness of ITO2 pattern.…”