Oxygen-plasma induced hydrogen desorption from hydrogen-terminated Si(100) and (111) surfaces investigated by infrared spectroscopy

Shinohara, Masanori; Katagiri, Teruaki; Iwatsuji, Keitaro; Matsuda, Yoshinobu; Kimura, Yasuo; Niwano, Michio

doi:10.1016/j.tsf.2004.06.025

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Cited by 3 publications

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“…doi:10.1016/j.tsf.2005.08.143 gas delivery system, as described previously [8][9][10]. The base pressure of the chamber was maintained below 1 Â10 À 6 Torr.…”

Section: Methodsmentioning

confidence: 99%

Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy

et al. 2006

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“…doi:10.1016/j.tsf.2005.08.143 gas delivery system, as described previously [8][9][10]. The base pressure of the chamber was maintained below 1 Â10 À 6 Torr.…”

Section: Methodsmentioning

confidence: 99%

Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy

et al. 2006

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Infrared spectroscopic study of thermal annealing effects of hydrocarbon species on a Si surface exposed to methane plasma

Shinohara

Iwatsuji

Katagiri

et al. 2006

Applied Surface Science

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Analysis of the Surface Coverage of a Self-Assembled Monolayer of Octadecyl Silane on a Si(100) Surface by Infrared External-Reflection Spectroscopy

et al. 2013

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The coverage of a self-assembled monolayer (SAM) of octadecyl silane on a silicon surface is analyzed by infrared external-reflection spectrometry via molecular orientation analysis. A commercially available octadecyl trimethoxy silane (ODS) solution is employed, which readily reacts with an oxidized surface of Si(100) prepared by a UV/ozone treatment in an ambient condition to yield a highly reproducible SAM. With the present technique, a very flat surface with no holes is obtained in the entire area of the SAM. IR external-reflection spectra of the SAM apparently indicate that the alkyl chains are highly ordered having the all-trans zigzag conformation, and the molecular orientation agrees with that of a Langmuir-Blodgett (LB) monolayer film of octadecanoic acid. Since the orientation analysis is based on an assumption that the surface is fully covered by the SAM as the LB film, the agreement of the orientation confirms that the surface coverage of the present SAM on Si(100) is on the same level as the LB film.

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Oxygen-plasma induced hydrogen desorption from hydrogen-terminated Si(100) and (111) surfaces investigated by infrared spectroscopy

Cited by 3 publications

References 23 publications

Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy

Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy

Infrared spectroscopic study of thermal annealing effects of hydrocarbon species on a Si surface exposed to methane plasma

Analysis of the Surface Coverage of a Self-Assembled Monolayer of Octadecyl Silane on a Si(100) Surface by Infrared External-Reflection Spectroscopy

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