2013
DOI: 10.2116/analsci.29.979
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Analysis of the Surface Coverage of a Self-Assembled Monolayer of Octadecyl Silane on a Si(100) Surface by Infrared External-Reflection Spectroscopy

Abstract: The coverage of a self-assembled monolayer (SAM) of octadecyl silane on a silicon surface is analyzed by infrared external-reflection spectrometry via molecular orientation analysis. A commercially available octadecyl trimethoxy silane (ODS) solution is employed, which readily reacts with an oxidized surface of Si(100) prepared by a UV/ozone treatment in an ambient condition to yield a highly reproducible SAM. With the present technique, a very flat surface with no holes is obtained in the entire area of the S… Show more

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Cited by 17 publications
(25 citation statements)
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References 23 publications
(34 reference statements)
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“…21 In this manner, the band intensity is influenced by the molecular orientation as well as the molecular density. The spectrum at 0 t  sec of the present study quantitatively reproduces the spectra reported in a former study, 8 which confirms that the reproducibility of the SAM on silicon is very high. The band positions of the two modes (2917 and 2850 cm -1 ) tell us that the molecules have the all-trans zigzag conformation.…”
Section: Removal Of Domains Using Soft Plasmasupporting
confidence: 91%
See 1 more Smart Citation
“…21 In this manner, the band intensity is influenced by the molecular orientation as well as the molecular density. The spectrum at 0 t  sec of the present study quantitatively reproduces the spectra reported in a former study, 8 which confirms that the reproducibility of the SAM on silicon is very high. The band positions of the two modes (2917 and 2850 cm -1 ) tell us that the molecules have the all-trans zigzag conformation.…”
Section: Removal Of Domains Using Soft Plasmasupporting
confidence: 91%
“…For the detail of the solvent, the reader is referred to the literature. 8 For the background measurements of the IR spectra, a hydrogen-terminated silicon wafer was prepared by using a standard technique described in the same literature. The domains marked by a~k are used to pursue the reaction with time (see Figure 6).…”
Section: Preparation Of Sam On Silicon For Ir Studiesmentioning
confidence: 99%
“…To examine the analytical accuracy in the ordinate scale, the molecular orientation in a thin film of highly oriented molecules is checked. To do that, a self-assembled monolayer (SAM) 23,24 of octadecyl trimethoxy silane (ODS) 25 prepared on a Si substrate is employed. The IR pMAIRS spectra of the SAM measured by using the optimal angle set are presented in Figure 8.…”
Section: Figures 5 and 6 Present The Ir Pmairs-ip And -Op Spectra Of mentioning
confidence: 99%
“…Making a highly condensed and stable SAM on a Si surface is a little bit difficult task for normal hydrocarbons. [12][13][14][15][16][17] The SAM formation requires nucleation of molecules at the initial stage, and the nucleus is developed by connecting with each other two-dimensionally. 16 Very fortunately, Rf groups intrinsically have a nucleation property due to the SDA packing, which is quite suitable for the SAM formation.…”
Section: Resultsmentioning
confidence: 99%
“…3 In the present study, a silicon (Si) substrate is chosen as the substrate, and artificially arranged molecular aggregates are prepared by using the Langmuir-Blodgett (LB) 10 and selfassembled monolayer (SAM) techniques. [11][12][13][14][15][16][17][18] Since a SAM coverage is attained by controlling the surface reactivity with the substrate surface, SAM is an artificial molecular aggregate. As a result, very low surface energy is readily realized even for a short-Rf containing compound by the SAM technique; whereas the LB technique is inadequate for the stability of the hydrophobicity.…”
Section: Introductionmentioning
confidence: 99%