Oxygen-adsorption characterization of activated non-evaporable Ti–Zr–V getter films by synchrotron radiation photoemission spectroscopy

Li, Chien Cheng; Huang, Jow Lay; Lin, Ran; Lii, Ding-Fwu; Chen, Chia Hao

doi:10.1016/j.tsf.2007.07.157

Cited by 6 publications

(4 citation statements)

References 13 publications

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“…The change in XPS core level spectra is documented in Figure . The shift of the V2p, Ti2p, Zr3d states to lower binding energy is characteristic for the chemical reduction of the metal elements and a loss of surface metal–oxygen bonds, [ 72,73 ] which is traceable by the reduction of the O1s signal intensity (see Figure 4c,f). Furthermore, the states in the C1s spectra shift from ≈285 to ≈282.5 eV above 200 °C, induced by a transformation of hydrocarbon adsorbates on the reactive surface and formation of metal carbide bonds.…”

Section: Resultsmentioning

confidence: 99%

Efficient Combination of Surface Texturing and Functional Coating for Very Low Secondary Electron Yield Surfaces and Rough Nonevaporable Getter Films

Himmerlich

Zanin

Taborelli

et al. 2022

Adv Materials Inter

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Section: Resultsmentioning

confidence: 99%

Efficient Combination of Surface Texturing and Functional Coating for Very Low Secondary Electron Yield Surfaces and Rough Nonevaporable Getter Films

Himmerlich

Zanin

Taborelli

et al. 2022

Adv Materials Inter

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“…This was attributed to the critical role of the gas diffusion into the Ti film with higher porosity at the high activation temperature. The XPS depth profile of the Ti NEG films clearly demonstrated a higher atomic ratio of gas molecules for the sputtered Ti film at the middle and bottom sections compared to the top section [22][23][24]. This indicated that the sputtered Ti NEG film possessed a higher porosity, which was more advantageous for gas adsorption.…”

Section: Comparison Of Ti Neg Films By Evaporator and Sputtermentioning

confidence: 93%

Controlled adsorption of gas molecules by tuning porosity of titanium film

Han,

Kim,

Lee

et al. 2024

Smart Mater. Struct.

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At the wafer-level package stage, the interior of the sensor can be easily converted into a vacuum environment. However, after packaging, degassing occurs due to the accumulation of fumes with additional processing, resulting in a significant reduction in sensor reliability. To counteract this, non-evaporable getter (NEG) film is commonly packaged together with the sensor to absorb the outgassing gas molecules and maintain a vacuum environment within the sensor. Most NEG films require an activation process to migrate the adsorbed gas molecules from the surface to the bulk by thermal annealing. Recently, NEG films have been considered to reduce the activation temperature and time to avoid heat damage. Depositing an anti-oxidant layer on NEG film or alloying the NEG film with metallic materials through co-sputtering to create a distinct valence state during activation was found to prevent further oxidation of NEG film. However, these methods require expensive materials and fabrication equipment. In this study, we demonstrate that a much lower activation temperature (T = 350 °C) and time (t = 10 min) for Ti NEG film can be achieved by controlling the surface morphology depending on the deposition method and condition, without requiring further treatment such as the deposition of a capping layer or co-sputtering. Increasing the grain size of the Ti NEG film results in a larger surface area, which enables more efficient adsorption of gas molecules. Additionally, higher porosity in the film increases the diffusion of gas molecules, thus enhancing the overall gas adsorption capacity. Our experiments show that the Ti NEG film, which was deposited at 7.8 Å/s using a sputtering method, exhibited a grain size of 411 nm and a surface roughness of 59.185 nm. Furthermore, after an activation process at 350 °C for 10 min, the atomic ratio of the adsorbed gas molecules was 23.14%.

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“…Non-evaporable getter (NEG) films, due to their special microstructures for high foreign atom holding capacity and high reactivity with gas molecules, have become an essential component in situations where ultrahigh or extremely high vacuum is required. − However, a passivation layer forms on the surface of this special material when exposed to air, which requires thermal vacuum activation prior to use. Research ,− on the composition of the passivation layer is critical to improving the activation performance and extending the lifetime of NEG films. X-ray photoelectron spectroscopy (XPS) − and synchrotron radiation photoemission spectroscopy (SRPES) , are the dominant research approaches.…”

Section: Introductionmentioning

confidence: 99%

“…Research ,− on the composition of the passivation layer is critical to improving the activation performance and extending the lifetime of NEG films. X-ray photoelectron spectroscopy (XPS) − and synchrotron radiation photoemission spectroscopy (SRPES) , are the dominant research approaches. This method facilitates an understanding of the formed compositional characteristics, but it lacks details and is not sufficient to gain insight into the passivation layer formation mechanism.…”

Section: Introductionmentioning

confidence: 99%

Formation Mechanism of Passivation Layer under Air Exposure on TiZrV Non-Evaporable Getter Film

Shi,

Wang,

Shi

et al. 2024

J. Phys. Chem. C

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Non-evaporable getter (NEG) films require thermal vacuum activation prior to their use in high vacuum environments. The degree of activation difficulty is influenced by the properties of the passivation layer, but there is limited information about its composition. The purpose of this study is to investigate the formation mechanism and clarify this issue. The film microstructure was investigated by scanning electron microscopy (SEM) and grazing incidence X-ray diffraction (GIXRD). The quantum chemical approach and a single-metal-atom catalytic model were used to calculate the energy barrier for the reactions between the metal atom and the gas molecule, as well as between different hydrocarbon groups. These results facilitated the deconvolution of the X-ray photoelectron spectroscopy (XPS) data and the variation analysis of the energy dispersive spectroscopy (EDS) results. It can be concluded that the presence or absence of hydrogen-proton catalysis can significantly affect the dissociation pathways of carbon dioxide, leading to the formation of different reaction products. In addition, the long-term aluminum foil wrapping and storage can significantly affect the composition of the film passivation layer. This study provides valuable insights not only into the passivation layer formation mechanism, but also into the film gettering mechanism.

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Oxygen-adsorption characterization of activated non-evaporable Ti–Zr–V getter films by synchrotron radiation photoemission spectroscopy

Cited by 6 publications

References 13 publications

Efficient Combination of Surface Texturing and Functional Coating for Very Low Secondary Electron Yield Surfaces and Rough Nonevaporable Getter Films

Efficient Combination of Surface Texturing and Functional Coating for Very Low Secondary Electron Yield Surfaces and Rough Nonevaporable Getter Films

Controlled adsorption of gas molecules by tuning porosity of titanium film

Formation Mechanism of Passivation Layer under Air Exposure on TiZrV Non-Evaporable Getter Film

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