Controlled adsorption of gas molecules by tuning porosity of titanium film
Sangwug Han,
Taehyun Kim,
Jubeom Lee
et al.
Abstract:At the wafer-level package stage, the interior of the sensor can be easily converted into a vacuum environment. However, after packaging, degassing occurs due to the accumulation of fumes with additional processing, resulting in a significant reduction in sensor reliability. To counteract this, non-evaporable getter (NEG) film is commonly packaged together with the sensor to absorb the outgassing gas molecules and maintain a vacuum environment within the sensor. Most NEG films require an activation process to … Show more
In this work, 3D-printed Ti6Al4V structures are used as substrates to synthesize TiO2 nanotube arrays by electrochemical anodization. These nanostructured materials are used as supports for bimetallic FeCo catalysts in...
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