2003
DOI: 10.1002/pssc.200303471
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Oxidation treatment on Ni/Au Ohmic contacts to p‐type GaN

Abstract: PACS 73.40.Cg, 73.61.Ey Current-voltage (I-V) characteristics, transmission line method (TLM), and optical transmittance measurements are performed to investigate the effects of thermal oxidation and plasma-induced oxidation treatments on Ni/Au contacts to p-type GaN. Whether oxidation and thermal annealing are performed simultaneously or in succession, the specific contact resistances of Au/Ni/p-GaN are reduced. As to plasmainduced oxidation, neither no-oxidation nor long-time oxidation treatments on Ni/Au la… Show more

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