Oxidation of CVD β-SiC in Impurity-Controlled Helium Environment at 950℃

Kim, Daejong; Kim, Weon-Ju; Jang, Jieun; Yoon, Soon‐Gil; Kim, Dong-Jin; Park, Ji Yeon

doi:10.4191/kcers.2011.48.5.426

Cited by 4 publications

(1 citation statement)

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“…서 론 탄화규소 (SiC)는 높은 열전도도와 내열성 및 내식성과 화학적 안정성이 우수하여 많은 산업분야에서 널리 사용 되고 있는 대표적인 비산화물계 세라믹스이다. [1][2][3][4] 최근에 β-SiC 세라믹스는 초집적 반도체 공정 및 LED 공정용 초 고순도 SiC 부품, 태양광 발전 및 고효율화를 위한 고품 위 SiC 에너지 반도체 등으로 쓰임이 확대되고 있다. SiC 세라믹스의 물성은 분말의 특성에 많은 영향을 받기 때 문에 원료 분말에 대한 관심이 증대되고 있다.…”

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Effect of the C/Si Molar Ratio on the Characteristics of β-SiC Powders Synthesized from TEOS and Phenol Resin

Youm¹,

Park²,

Kim³

2013

Journal of the Korean Ceramic Society

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β-SiC powders were synthesized by a carbothermal reduction process using SiO 2 -C precursors fabricated by a sol-gel process using phenol resin and TEOS as starting materials for carbon and Si sources, respectively. The C/Si molar ratio was selected as an important parameter for synthesizing SiC powders using a sol-gel process, and the effects of the C/Si molar ratio (1.4-3.0) on the particle size, particle size distribution, and yield of the synthesized β-SiC powders were investigated. It was found that (1) the particle size of the synthesized β-SiC powders decreased with an increase in the C/Si molar ratio in the SiO 2 -C hybrid precursors, (2) the particle size distribution widened with an increase in the C/Si molar ratio, and (3) the yield of the β-SiC powder production increased with an increase in the C/Si molar ratio.

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