“…4 and 5 display the AFM surface morphology and roughness of CVD SiC specimens, respectively, before and after the corrosion tests with the control of dissolved hydrogen. In general, the corrosion of SiC, or the formation of SiO 2 , causes an increase in surface roughness because of the local corrosion (pitting or grain boundary attacks) and the inhomogeneous growth of SiO 2 [7,28]. However, there was no meaningful change in surface morphology and roughness after the corrosion tests, based on the AFM results in Figs.…”