2003
DOI: 10.1016/s0039-6028(02)02561-x
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Oxidation of aluminum studied by secondary electron emission

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Cited by 22 publications
(13 citation statements)
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“…This model is also supported by others SEY measurements, with a 3 keV electron beam energy, of an evaporated Al and grown Al 2 O 3 thin film [14] [15]. The SEY, at 3 keV, of an Al thin film exposed to oxygen shows a dip, and this is independent of the oxygen pressure in the vacuum chamber [15].…”
Section: Explaining the Dip In The Sey Curvesupporting
confidence: 75%
“…This model is also supported by others SEY measurements, with a 3 keV electron beam energy, of an evaporated Al and grown Al 2 O 3 thin film [14] [15]. The SEY, at 3 keV, of an Al thin film exposed to oxygen shows a dip, and this is independent of the oxygen pressure in the vacuum chamber [15].…”
Section: Explaining the Dip In The Sey Curvesupporting
confidence: 75%
“…This model is also supported by others SEY measurements, with a 3 keV electron beam energy, of an evaporated Al and grown Al 2 O 3 thin film [12] [13]. The SEY, at 3 keV, of an Al thin film exposed to oxygen shows a dip, and this is independent of the oxygen pressure in the vacuum chamber [13]. For comparison, no dip is seen on copper because copper oxide (Cu 2 O) has a lower SEY than the pure Cu [14] [2].…”
Section: Explaining the Dip In The Sey Curvesupporting
confidence: 82%
“…On starting to add the small amount of oxygen to the working gas mixture an increase of magnetron voltage takes place due to oxygen chemisorption [35] (see Figure 3b). Since the O atom, upon an impact of an energetic ion, will contribute less to electron emission than an Al atom, the presence of adsorbed oxygen atoms will lower overall electron emission yield [36]. This in turn results in the increase of magnetron voltage.…”
Section: Al and Al X O Y Nanoparticlesmentioning
confidence: 99%