Oxidation behavior of Ru–Al multilayer coatings

Chen, Yung-I; Zheng, Zhi-Ting; Kai, Wu; Huang, Yu-Ren

doi:10.1016/j.apsusc.2017.02.096

Cited by 9 publications

(15 citation statements)

References 24 publications

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“…Because the substrate temperature was sustained at 400 • C during cosputtering, the deposited atoms formed an intermetallic RuZr compound, as observed by the XRD patterns. In our previous study [26], B2-RuAl phase was observed for Ru-Al multilayer coatings prepared at 400 • C.…”

Section: Methodsmentioning

confidence: 99%

“…deposited atoms formed an intermetallic RuZr compound, as observed by the XRD patterns. In our previous study [26], B2-RuAl phase was observed for Ru-Al multilayer coatings prepared at 400 °C. deposited atoms formed an intermetallic RuZr compound, as observed by the XRD patterns.…”

Section: As-deposited Equiatomic Ru-zr Coatingsmentioning

confidence: 99%

“…deposited atoms formed an intermetallic RuZr compound, as observed by the XRD patterns. In our previous study [26], B2-RuAl phase was observed for Ru-Al multilayer coatings prepared at 400 °C. Figure 4 shows the cross-sectional SEM image of the annealed Ru 0.50 Zr 0.50 (R1) coating, which exhibited a laminated structure with an equilibrated laminated layer period of 55 nm.…”

Section: As-deposited Equiatomic Ru-zr Coatingsmentioning

confidence: 99%

“…The binding energy value of Ru 0 3d5/2 (279.96 ± 0.08 eV) was consistent with that of other coatings (279.69-280.16 eV) reported in the literature [13,16,17,27], whereas the binding energies of Ru x+ and Ru 4+ 3d5/2 were 280.45 ± 0.11 and 282.57 ± 0.15 eV, respectively. Previous studies reported 281.4-282.2 eV [26,[28][29][30] for the binding energy of Ru 4+ 3d5/2. Ru of 17%-20% exhibited the Ru 4+ state at a depth of 0-13 nm.…”

Section: As-deposited Equiatomic Ru-zr Coatingsmentioning

confidence: 99%

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Internally Oxidized Ru–Zr Multilayer Coatings

Chen

Zheng

2017

Coatings

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Abstract:In this study, equiatomic Ru-Zr coatings were deposited on Si wafers at 400 • C by using direct current magnetron cosputtering. The plasma focused on the circular track of the substrate holder and the substrate holder rotated at speeds within 1-30 rpm, resulting in cyclical gradient concentration in the growth direction. The nanoindentation hardness levels of the as-deposited Ru-Zr coatings increased as the stacking periods of the cyclical gradient concentration decreased. After the coatings were annealed in a 1% O 2 -99% Ar atmosphere at 600 • C for 30 min, the internally oxidized coatings shifted their respective structures to a laminated structure, misaligned laminated structure, and nanocomposite, depending on their stacking periods. The effects of the stacking period of the cyclical gradient concentration on the mechanical properties and structural evolution of the annealed Ru-Zr coatings were investigated in this study.

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Section: Methodsmentioning

confidence: 99%

Section: As-deposited Equiatomic Ru-zr Coatingsmentioning

confidence: 99%

“…deposited atoms formed an intermetallic RuZr compound, as observed by the XRD patterns. In our previous study [26], B2-RuAl phase was observed for Ru-Al multilayer coatings prepared at 400 °C. Figure 4 shows the cross-sectional SEM image of the annealed Ru 0.50 Zr 0.50 (R1) coating, which exhibited a laminated structure with an equilibrated laminated layer period of 55 nm.…”

Section: As-deposited Equiatomic Ru-zr Coatingsmentioning

confidence: 99%

Section: As-deposited Equiatomic Ru-zr Coatingsmentioning

confidence: 99%

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Internally Oxidized Ru–Zr Multilayer Coatings

Chen

Zheng

2017

Coatings

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“…For example, Ru-Al alloys have been applied for jet engine components, bond coats for thermal barrier coatings, corrosion-and oxidation-protective coatings, and electrodes [1,2], whereas Ta-Al alloys have been applied for sulfidation and oxidation-protective coatings [3][4][5], heater materials [12][13][14], and electromagnetic shielding [15]. A previous paper [16] evaluated the oxidation behavior of Ru-Al multilayer coatings in 1% O 2 -99% Ar at 400-800 • C. In our co-sputtering system [16][17][18][19][20][21], the plasma sources focused on a circular track but not the center of the substrate-holder; thus, a multilayer coating with cyclical gradient concentration formed, as the substrate-holder was rotated in a low speed of 1-7 rpm. Such multilayer coatings were constructed by alloy sublayers with continuous variation in compositions, but not monolithic sublayers of distinct elements.…”

Section: Introductionmentioning

confidence: 99%

Oxidation Behavior of Ta–Al Multilayer Coatings

Chen

Lin

2019

Coatings

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Ta-Al multilayer coatings were fabricated through cyclical gradient concentration deposition by direct current magnetron co-sputtering. The as-deposited coatings presented a multilayer structure in the growth direction. The oxidation behavior of the Ta-Al multilayer coatings was explored. The results specified that Ta-rich Ta-Al multilayer coatings demonstrated a restricted oxidation depth after annealing at 600 • C in 1% O 2 -99% Ar for up to 100 h. This was attributed to the preferential oxidation of Al, the formation of amorphous Al-oxide sublayers, and the maintenance of a multilayer structure. By contrast, Ta 2 O 5 formed after exhausting Al in the oxidation process in an ambient atmosphere at 600 • C which exhibited a crystalline Ta 2 O 5 -amorphous Al-oxide multilayer structure.

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Zn–Fe multilayered alloy coatings produced by electrodeposition

2018

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Zn-Fe multilayered alloy coatings were deposited on mild steel substrates using the dual bath electrodeposition technique. The produced coatings consisted of alternate Zn-1 wt% Fe and Zn-10 wt% Fe alloy sub-layers. Their periodicity length (total thickness of two adjacent alternate sub-layers) ranged between 2 and 8 μm. The surface and the crosssectional morphology of those coatings were studied with the aid of a metallurgical microscope and a scanning electron microscope. The crystal structure of the electrodeposited multilayered coatings was investigated using an X-ray diffractometer. The Zn-1 wt% Fe and Zn-10 wt% Fe alloy sub-layers consisted of two phases: the η-phase (Zn-Fe solid solution) and the δ 1-phase (intermetallic FeZn 7). A microhardness tester equipped with a Vickers intender was used to examine the microhardness of the produced coatings. It was found that the microhardness increased with the decrease of periodicity length, following a modified Hall-Petch relationship.

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Oxidation behavior of Ru–Al multilayer coatings

Cited by 9 publications

References 24 publications

Internally Oxidized Ru–Zr Multilayer Coatings

Internally Oxidized Ru–Zr Multilayer Coatings

Oxidation Behavior of Ta–Al Multilayer Coatings

Zn–Fe multilayered alloy coatings produced by electrodeposition

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