2015
DOI: 10.1016/j.ceramint.2015.04.014
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Oxidation behavior of CVD star-shaped TiN coating in ambient air

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Cited by 20 publications
(15 citation statements)
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“…NH4Cl and organic decomposed can be deposited in low temperature zone. References about CVD suggested that it was easier to form TiN for higher substrate temperature and the synthesis temperature and substrate temperature were often above 1000℃ and 700℃ separately [14][15][16]. Hu et al considered that TiCl3 could react with the decompose gases of NH3 at 570℃ to form TiN by thermodynamic calculation [18].…”
Section: Rusults and Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…NH4Cl and organic decomposed can be deposited in low temperature zone. References about CVD suggested that it was easier to form TiN for higher substrate temperature and the synthesis temperature and substrate temperature were often above 1000℃ and 700℃ separately [14][15][16]. Hu et al considered that TiCl3 could react with the decompose gases of NH3 at 570℃ to form TiN by thermodynamic calculation [18].…”
Section: Rusults and Discussionmentioning
confidence: 99%
“…In reactive ball milling, impurities will often be introduced into the powders from the milling medium, therefore, the ideal low energy cost method for synthesizing pure TiN is CVD. The raw materials for synthesizing TiN by CVD are usually TiCl4, N2 and H2, and the synthesis temperature is in the range of 750℃ to 1000℃ [14][15][16]. N. Ramanuja et al synthesized TiN coating by low-pressure chemical vapor deposition (LPCVD) using TiCl4 and NH3 as raw materials.…”
Section: Introductionmentioning
confidence: 99%
“…As a result, the anti-coking performance of TiN and TiC coatings is better than that of TiO 2 coating. [20,22]. Therefore, TiC coating can be used as an excellent anti-coking coating with a better high temperature oxidation resistance than TiN coating.…”
Section: Oxidation Resistance Of the Tic Coatingmentioning
confidence: 97%
“…The results show that TiN coating has an excellent anti-coking performance but poor oxidation resistance [22]. On the contrary, TiO 2 coating has a good oxidation resistance at high temperature but poor anti-coking performance.…”
Section: Introductionmentioning
confidence: 95%
“…Furthermore, on the basis of previous works, the TiN coating has excellent anti-coking performance, but poor oxidation resistance, while the TiO 2 coating has good oxidation resistance at high temperature, but poor anti-coking performance [26]. This paper tries to provide more information on the relationship between the anti-coking performance and the growth characteristics and properties of CVD TiN and TiO 2 anti-coking coatings, and thus provide guidance for designing better anti-coking coatings.…”
Section: Introductionmentioning
confidence: 94%