1999
DOI: 10.1117/12.351660
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Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications

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Cited by 171 publications
(144 citation statements)
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“…The fundamental limitations of our technique are thus the experimental error bars and the quality of our least square fitting. This technique has been shown to accurately reproduce optical constants obtained alternately through direct KK analysis of reflectivity, THz time domain spectroscopy, and ellipsometry [38][39][40] . The IR conductivity spectrum σ(ω) can then be found simply from σ(ω) = i…”
Section: Experimental Methodsmentioning
confidence: 99%
“…The fundamental limitations of our technique are thus the experimental error bars and the quality of our least square fitting. This technique has been shown to accurately reproduce optical constants obtained alternately through direct KK analysis of reflectivity, THz time domain spectroscopy, and ellipsometry [38][39][40] . The IR conductivity spectrum σ(ω) can then be found simply from σ(ω) = i…”
Section: Experimental Methodsmentioning
confidence: 99%
“…There is no fixed MSE value that resolves if a model can be considered correct or not. For thicker films and in-situ measurements, a maximum value of 20 is considered to be reasonable [30].…”
Section: Spectroscopic Ellipsometrymentioning
confidence: 99%
“…During an indirect fitting procedure 7 the n, k and thickness values in the model are varied until an appropriate fit of the measured  and  spectra is found based on the Mean Square Error (MSE) value. 30 If appropriate MSE values are reached, the actual n, k and thickness values of the model are considered as the ones of the investigated sample.…”
Section: Spectroscopic Ellipsometrymentioning
confidence: 99%