Micromanufacturing Engineering and Technology 2015
DOI: 10.1016/b978-0-323-31149-6.00001-3
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Overview of Micro-manufacturing

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Cited by 33 publications
(28 citation statements)
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“…The technique is then referred as electrochemical polishing. The quality of the resulting surface is depending severely on the type of the electrolyte and the workpiece material and can reach optical quality [100]. Using a modified ECM process, Kurita and Hattori achieved a surface roughness of 0.06 µm [101].…”
Section: Form-giving Technologiesmentioning
confidence: 99%
“…The technique is then referred as electrochemical polishing. The quality of the resulting surface is depending severely on the type of the electrolyte and the workpiece material and can reach optical quality [100]. Using a modified ECM process, Kurita and Hattori achieved a surface roughness of 0.06 µm [101].…”
Section: Form-giving Technologiesmentioning
confidence: 99%
“…To meet this demand for multi-material micromanufacturing, it is essential for continuous improvement in micro- and nanofabrication technologies. 2 There exists a broad range of microfabrication technologies each having its own capabilities, applications and limitations. Numerous classification systems are used to classify microfabrication techniques.…”
Section: Introductionmentioning
confidence: 99%
“…Manufacturing processes such as lEDM, micro-milling or laser ablation are established techniques in this field, but suffer from high cost, tool wear or induced thermal stress, respectively [1,12]. Laser chemical machining (LCM) is a promising alternative process that allows for inexpensive manufacturing of microstructures in hard metals, such as dies for microforming [18], without heat damage or structural alterations to the material [2].…”
Section: Motivationmentioning
confidence: 99%