2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1) 2012
DOI: 10.1109/ispts.2012.6260966
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Overview and innovations in LTCC manufacturing for 3D, sensors and MEMS applications

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“…LTCC is a multilayer technology that has been used for packaging integrated circuits (ICs) and applied to actuators, sensors, and integrated microsystems with relatively low cost and high productivity [6][7][8][9][10][11][12][13][14][15][16]. LTCC-based circuits have an extensive range of applications in areas such as telecommunications, automotive aeronautics, radio frequency (RF) modules (Mobile phone, Bluetooth, Home RF, IEEE 802.11), microwave modules, optoelectronic modules, and medical, military, and sensors packaging [17][18][19].…”
Section: Introductionmentioning
confidence: 99%
“…LTCC is a multilayer technology that has been used for packaging integrated circuits (ICs) and applied to actuators, sensors, and integrated microsystems with relatively low cost and high productivity [6][7][8][9][10][11][12][13][14][15][16]. LTCC-based circuits have an extensive range of applications in areas such as telecommunications, automotive aeronautics, radio frequency (RF) modules (Mobile phone, Bluetooth, Home RF, IEEE 802.11), microwave modules, optoelectronic modules, and medical, military, and sensors packaging [17][18][19].…”
Section: Introductionmentioning
confidence: 99%