2017
DOI: 10.1016/j.solmat.2016.10.050
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Organic passivation of silicon through multifunctional polymeric interfaces

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Cited by 5 publications
(5 citation statements)
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“…Yang et al and Castillo et al have examined the passivation capabilities of room temperature deposited/formed multifunctional polymeric films using chemical vapor deposition (CVD). While good passivation ( S < 10 cm s −1 ) has been achieved by this method, the use of a CVD system is not attractive for low cost and straightforward passivation.…”
Section: Types Of Temporary Surface Passivationmentioning
confidence: 99%
“…Yang et al and Castillo et al have examined the passivation capabilities of room temperature deposited/formed multifunctional polymeric films using chemical vapor deposition (CVD). While good passivation ( S < 10 cm s −1 ) has been achieved by this method, the use of a CVD system is not attractive for low cost and straightforward passivation.…”
Section: Types Of Temporary Surface Passivationmentioning
confidence: 99%
“…Organic materials with access to electronics or optoelectronics provide an inexpensive, low-temperature and solution-processing accessible approach. , The anticipated advantage of organic passivation schemes is their potential for low-cost processing. In this regard, for example, Bullock and Grant et al have developed an organic passivation method in which silicon wafers are briefly dipped in a nonaqueous bis­(trifluoromethane)­sulfonimide superacid solution with a τ eff of ∼8 ms. , Castillo et al have demonstrated a low-temperature (<170 °C) approach using CVD grafting and polymerization processes to passivate the surface of silicon to obtain a τ eff of >2 ms . Other studies have shown that the presence of an organic thin-film [such as [6,6]-phenyl-C 61 -butyric acid methyl ester, 8-hydroxyquinolinolato-lithium, and poly­(3,4-ethylenedioxythiophene):poly­(styrenesulfonate) (PEDOT:PSS)] is essential for suppressing carrier recombination. Our previous work found that a PSS thin film fabricated by the sol–gel method can passivate Si well, yielding a τ eff of >2 ms on wafers with a resistivity of 1–5 Ω·cm after heat treatment at 130 °C for 10 min …”
Section: Introductionmentioning
confidence: 99%
“…The mechanism of replacement likely occurs through the abstraction of hydrogen by an initial methyl radical and the reaction with a second methyl radical to form the methylated backbone. Indeed, previous studies have shown that methyl radicals generated from the decomposition of TBPO can abstract hydrogen from the Si–H bond. , …”
Section: Resultsmentioning
confidence: 99%
“…Indeed, previous studies have shown that methyl radicals generated from the decomposition of TBPO can abstract hydrogen from the Si−H bond. 23,24 To test the abstraction hypothesis, reference PS samples from PIKE Technologies were exposed to TBPO vapor at a filament temperature of 330 °C. Figure 3c shows the ATR− FTIR spectra of a treated sample compared with the as-received sample.…”
Section: ■ Results and Discussionmentioning
confidence: 99%