1989
DOI: 10.1021/bk-1989-0407.ch008
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Organic Dielectric Materials with Reduced Moisture Absorption and Improved Electrical Properties

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Cited by 13 publications
(8 citation statements)
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“…Polyimides with a low dielectric constant, low refractive index, low water absorption, and a low coefficient of thermal expansion are being explored for interlayer dielectrics in electronic devices such as integrated circuits. [2] The main drawbacks of these classes of polymers are their insolubility and intractability, which causes difficulties in both synthesis and processing. Therefore, the processing of the polyimides is generally carried out via soluble poly(amic acid) precursors, which are cast onto a glass plate and then converted into thin polyimide films by a rigorous thermal treatment.…”
Section: Introductionmentioning
confidence: 99%
“…Polyimides with a low dielectric constant, low refractive index, low water absorption, and a low coefficient of thermal expansion are being explored for interlayer dielectrics in electronic devices such as integrated circuits. [2] The main drawbacks of these classes of polymers are their insolubility and intractability, which causes difficulties in both synthesis and processing. Therefore, the processing of the polyimides is generally carried out via soluble poly(amic acid) precursors, which are cast onto a glass plate and then converted into thin polyimide films by a rigorous thermal treatment.…”
Section: Introductionmentioning
confidence: 99%
“…Polyimides are of great interest because they exhibit a number of outstanding properties such as excellent thermal stability in air, solvent resistance, and mechanical and electrical properties 1–12. These materials have been considered for use in numerous applications that require robust organic materials including composites and precursors for high‐performance aerospace materials as well as membranes for gas separation 11.…”
Section: Introductionmentioning
confidence: 99%
“…These materials have been considered for use in numerous applications that require robust organic materials including composites and precursors for high‐performance aerospace materials as well as membranes for gas separation 11. Polyimides with low dielectric constants, low refractive indices, low water absorption, and low coefficients of thermal expansion are receiving interest for interlayer dielectrics in electronic devices such as integrated circuits 4, 7, 12…”
Section: Introductionmentioning
confidence: 99%
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“…The coefficient of thermal expansion of polyimide is related to the linearity of polymer molecular skeletons, thus many researchers have attempted to modify the polymer backbone to reduce the coefficient of thermal expansion, such as incorporating fluorine into the polymer backbone . However, the incorporation of fluorine into polyimide degrades the mechanical properties of polyimide significantly . Compared with other types of polymers, polyimide absorb much more moisture, for example, the typical saturated moisture absorption of polyimide can be as high as 4.4%, which is considerably higher than epoxy (1.5%) and PEEK (0.5%) .…”
Section: Introductionmentioning
confidence: 99%