Ordered phase in HgCdTe thin films grown by reactive deposition in RF mercury glow discharge

Mansurov, L.G.; Savitsky, V.G.

doi:10.1016/b978-0-444-82411-0.50124-8

Search citation statements

Order By: Relevance

Paper Sections

Select...

Experiments and Discussion1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2001

Publication Types

Select...

Other1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

(1 citation statement)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It has been used the setup with self-contained working chamber which represents quasiclosed volume • (QCV) where the discharge excitation takes place and the processes of target sputtering and condensation of the sputtered material on the substrate are carried outs. Application of QCV allows controlling the pressure of saturated vapor of mercury in the wide range ( (5)(6)(7)(8) iO Torr) what greatly reduces condense contamination by residual gasses of the vacuum system.…”

Section: Experiments and Discussionmentioning

confidence: 99%

MnHgTe epitaxial layers grown by rf sputtering in mercury glow discharge

et al. 2001

View full text Add to dashboard Cite

The structure of MnHg1Te thin layers with x=O. 12-0. 19 deposited on CdTe substrates with (1 1 1) and (1 10) orientations has been investigated. The glow radio-frequency (RF) (Jl3 .56 MHz) discharge was excited according to the diode scheme in magnetic field. The process was carried out under Hg vapor pressure from 5 iO to 8 iO Torr with quasiclosed volume. The possibility of Hg vapour pressure regulation allowed to carry out reactive process of MnHgTe layers condensation. It has been shown. that RF sputtering of MnHgTe in mercury glow discharge permits to obtain epitaxial layers with perfect structure. Optimal values of substrate temperatures which lead to epitaxial growth are from 230 to 250°C. The carrier concentrations and their mobilities have been determined.

show abstract

Section: Experiments and Discussionmentioning

confidence: 99%