Epitaxial thin films of CuIn 1−x Ga x S 2 ͑0 ഛ x ഛ 1͒ were grown on single-crystalline silicon substrates of ͑111͒ orientation by means of molecular-beam epitaxy from elemental sources. Employing x-ray diffraction in transmission and reflection geometries, as well as Rutherford backscattering spectroscopy, the lattice parameters and compositions of these films were determined, respectively. A linear dependence of the lattice constants a and c on the gallium content x was found. Best lattice match with the cubic silicon substrate was observed for x = 0.56. Furthermore, the coexistence of the metastable CuAu-type ordering with the ground-state chalcopyrite structure was found to depend on the gallium content. This coexistence of the stable ground-state structure with a metastable ordering is accompanied by a nonlinear dependence of the tetragonal distortion on the gallium content of the thin films.