“…4.Comparison of power factor between this work and the state of the art p-type Si-based and Bi 2 Te 3 thermoelectric thin films. References: MOCVD (metalorganic chemical vapor deposition),47 sputtering (Bi 2 Te 3 on polyimide substrate),48 arc-melting (to form nanostructured Bi 2 Te 3 ),49 solvothermal,50 nanosheets (for assembled of Bi 2 Te 3 ),51 hydrothermal,52 porous nanowire (Si arrays),53 polycrystalline nanopatterning (of Si film with phononic crystal),54 nc hydrogenated (B-doped Si),44 B-doped polycrystalline Si, 39 p-type, nc hydrogenated Si,55 in situ B-doped polycrystalline Si film,56 B-doped polycryslline Si film,22 and B-doped nanocrystalline Si 11.…”