Optimized Analysis of Sensitivity and Non-Linearity for PDMS–Graphene MEMS Force Sensor

Lamba, Monica; Chaudhary, Himanshu; Singh, Kulwant

doi:10.1080/03772063.2020.1795937

Cited by 6 publications

(2 citation statements)

References 53 publications

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“…Figure 4 illustrates typical structural design strategies for piezoresistive force sensors [ 55 , 57 , 59 , 62 , 63 , 64 , 74 , 78 , 123 , 143 , 144 , 145 , 155 , 156 , 157 , 168 , 169 , 170 , 171 , 172 , 173 , 174 , 175 , 176 , 177 , 178 , 179 , 180 , 181 , 182 , 183 , 184 , 185 , 186 , 187 , 188 , 189 , 190 , 191 , 192 , 193 , 194 , 195 ]. Generally, the researchers rely on the measured resistance change of the sensor architecture to determine the applied pressure/force ( Figure 4 a).…”

Section: Structures and Applications For Different Types Of Force Sen...mentioning

confidence: 99%

Rational Design of Flexible Mechanical Force Sensors for Healthcare and Diagnosis

Zhang,

Zhang

2023

Materials

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Over the past decade, there has been a significant surge in interest in flexible mechanical force sensing devices and systems. Tremendous efforts have been devoted to the development of flexible mechanical force sensors for daily healthcare and medical diagnosis, driven by the increasing demand for wearable/portable devices in long-term healthcare and precision medicine. In this review, we summarize recent advances in diverse categories of flexible mechanical force sensors, covering piezoresistive, capacitive, piezoelectric, triboelectric, magnetoelastic, and other force sensors. This review focuses on their working principles, design strategies and applications in healthcare and diagnosis, with an emphasis on the interplay among the sensor architecture, performance, and application scenario. Finally, we provide perspectives on the remaining challenges and opportunities in this field, with particular discussions on problem-driven force sensor designs, as well as developments of novel sensor architectures and intelligent mechanical force sensing systems.

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Section: Structures and Applications For Different Types Of Force Sen...mentioning

confidence: 99%

Rational Design of Flexible Mechanical Force Sensors for Healthcare and Diagnosis

Zhang,

Zhang

2023

Materials

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“…where σ ij1 and σ ij2 signify the total of longitudinal and transverse stresses (∆σ ij1 = σ i1 + σ j1 , ∆σ ij2 = σ i2 + σ j2 ), respectively, and σ ij3 and σ ij4 represent the difference between longitudinal and transverse stresses (∆σ ij3 = σ i1 − σ j1 , ∆σ ij4 = σ i2 − σ j2 ) separately [15,32]. Furthermore, considering the piezoresistive coefficient of graphene is impacted by temperature and doping concentration, all of the designs in this work are created at ambient temperature (25 • C) with a graphene doping concentration of 1 × 10 −13 cm −3 [33][34][35]. The sensor's output voltage depends on the various stresses, as stated in Equation ( 6); therefore, ∆σ ij may be considered a crucial element in designing the sensor construction.…”

Section: Depicts Thementioning

confidence: 99%

Design and Optimization of a Pressure Sensor Based on Serpentine-Shaped Graphene Piezoresistors for Measuring Low Pressure

Ren

Liu

et al. 2022

Sensors

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This thesis describes a novel microelectromechanical system (MEMS) piezoresistive pressure sensor based on serpentine-shaped graphene piezoresistors paired with trapezoidal prisms under the diaphragm for measuring low pressure. The finite element method (FEM) is utilized to analyze the mechanical stress and membrane deflection to enhance the degree of stress concentration in this unique sensor. The functional relationship between mechanical performance and dimension variables is established after using the curve fitting approach to handle the stress and deflection. Additionally, the Taguchi optimization method is employed to identify the best dimensions for the proposed structure. Then, the suggested design is compared to the other three designs in terms of operating performance. It is revealed that the recommended sensor can significantly improve sensitivity while maintaining extremely low nonlinearity. In this study, three different types of serpentine-shaped graphene piezoresistors are also designed, and their sensing capability is compared to silicon. The simulation results indicate that the pressure sensor with Type 2 graphene piezoresistors has a maximum sensitivity of 24.50 mV/psi and ultra-low nonlinearity of 0.06% FSS in the pressure range of 0–3 psi.

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A Review of Factors Affecting the Sensitivity of Piezoresistive Microcantilever Based MEMS Force Sensor

Lamba

Ananthi

Chaudhary

et al. 2022

Intelligent Computing Techniques for Smart Energy Systems

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Optimized Analysis of Sensitivity and Non-Linearity for PDMS–Graphene MEMS Force Sensor

Cited by 6 publications

References 53 publications

Rational Design of Flexible Mechanical Force Sensors for Healthcare and Diagnosis

Rational Design of Flexible Mechanical Force Sensors for Healthcare and Diagnosis

Design and Optimization of a Pressure Sensor Based on Serpentine-Shaped Graphene Piezoresistors for Measuring Low Pressure

A Review of Factors Affecting the Sensitivity of Piezoresistive Microcantilever Based MEMS Force Sensor

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