Optimization of Thermoelectric Microwave Power Sensors Based on Thin‐Membrane Structure

Research on Measurement Accuracy of the Double‐Channel Microwave Power Sensors Based on an MEMS Cantilever Beam

“…The power sensor based on the thermopile measures the microwave power sensor by the output voltage. A major advantage of thermopilebased power sensor is its exact physical definition and inherent broad frequency range [1,2] . The power sensor based on MEMS beam measures the microwave power sensor by the capacitance change.…”