2004
DOI: 10.1088/0963-0252/13/4/010
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Optimization of plasma etch processes using evolutionary search methods within situdiagnostics

Abstract: This paper presents several approaches that have been used to control, optimize and characterize a low pressure (10-300 mTorr) plasma processing system. Methods such as contour following and differential evolution have been used to find contours of DC bias, total ion flux, ion energy flux, quadrupole mass spectrum (QMS) intensity ratios and line intensity ratios of the optical emission spectrum (OES) in argon and nitrogen plasmas. A mapping for a 4 × 4 multi-dimensional parameter space is also presented, in wh… Show more

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Cited by 16 publications
(9 citation statements)
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“…This data demonstrates that the nitrogen etch process can be used to fabricate topography on a PS-b-P4VP BCP thin film comparable to the ethanol reconstruction process. Based on literature reports, it is anticipated that further work on optimising the etch process using plasma diagnostic tools could further enhance the etch selectivity and work towards reaching the standards of wet etching across larger sample areas without any defects [46][47][48][49].…”
Section: Resultsmentioning
confidence: 99%
“…This data demonstrates that the nitrogen etch process can be used to fabricate topography on a PS-b-P4VP BCP thin film comparable to the ethanol reconstruction process. Based on literature reports, it is anticipated that further work on optimising the etch process using plasma diagnostic tools could further enhance the etch selectivity and work towards reaching the standards of wet etching across larger sample areas without any defects [46][47][48][49].…”
Section: Resultsmentioning
confidence: 99%
“…In the performed etching processes, the variation of total flow rate of all trials was less than 10% of minimum total flow rate used and, consequently, also the variation of pressure was less than 10%. Summarizing, in this overall experimental setting we can neglect in a first approximation the variations of the local ion flux and of the average ion energy [6], [14] when the flow rate of the chemically active components changes.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…GA is one of the most popular search algorithms used by scholars in areas such as industrial engineering to attain a more accurate and optimal optimization result [5], [6]. For example, GA approach has been used to optimize industrial processes, reduce production costs, minimize manufacturing times and increase flexibility of machine selection [7].…”
Section: Literature Reviewmentioning
confidence: 99%