Optimization of Mechanical and Magnetic Properties in High, Electroplated Co–Fe-Flux Guides

Kruppe, Rahel; Wienecke, Anja; Rissing, Lutz

doi:10.1109/tmag.2013.2287759

Cited by 4 publications

(5 citation statements)

References 7 publications

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“…Based on the results described in previous studies (7), further experiments concerning the influence of deposition parameters on the mechanical and magnetic properties of electroplated Co-Fe films are carried out. The plating bath consists of a horizontal paddle cell with a pure (99.95 %) Co anode.…”

Section: Methodsmentioning

confidence: 99%

“…The favorable properties in combination with the severe disadvantages of iron-rich Co-Fe alloys triggered a great amount of research aiming at the minimization of film stress and corrosion sensitivity as well as the optimization of the magnetic properties (1)(2)(3)(4)(5). In previous studies (6,7), we examined very high (20 µm) ring-shaped Co-Fe flux guide structures for a 3D, ultra-thin magnetic field sensor. Due to the GMR sensors underneath the flux guides, a thermal treatment at temperatures above 150 °C to reduce film stress was not possible.…”

Section: Introductionmentioning

confidence: 99%

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Influence of Deposition Parameters on Mechanical Stress and Magnetic Properties in Thick, Electroplated Co-Fe Flux Guides

Kruppe

Rissing

2015

ECS Trans.

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A notable advantage of electroplated binary Co-Fe alloys in MEMS applications like sensors and actuators is the high saturation flux density BS, which may reach values of 2.4 T in a composition range of 50 – 70 wt% Fe. In contrast, there are certain disadvantages limiting the use of these alloys, e. g. high film stress, high corrosion sensitivity and high magnetostriction. The mechanical and magnetic properties of Co-Fe films influence each other strongly. They are determined by the films’ microstructure, given by film texture, grain size and morphology, structural defects and impurities. In this study, the effect of process conditions like current density, pulse duration, duty cycle, pH-value of the plating bath and application of a constant magnetic field parallel to the electrode surface on film stress, microstructure and magnetic properties are examined.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Influence of Deposition Parameters on Mechanical Stress and Magnetic Properties in Thick, Electroplated Co-Fe Flux Guides

Kruppe

Rissing

2015

ECS Trans.

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“…The sensor described here is based on GMR spin valves due to their high sensitivity and linearity. Soft magnetic flux guides are used to attenuate and redirect the (external) magnetic flux in the air gap [ 76 , 77 , 78 , 79 , 80 , 81 , 82 ].…”

Section: Current Developmentsmentioning

confidence: 99%

“…As the quality of the flux guides was crucial for the functionality of the sensor, investigations concerning the optimization of the electroplating process for the CoFe alloy were carried out. The goals were to increase the saturation flux density, B s , and to decrease the coercivity, H c , and the film stress [ 77 , 78 , 79 , 82 ].…”

Section: Current Developmentsmentioning

confidence: 99%

Recent Developments of Magnetoresistive Sensors for Industrial Applications

Jogschies

Klaas

Kruppe

et al. 2015

Sensors

Self Cite

230

113

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The research and development in the field of magnetoresistive sensors has played an important role in the last few decades. Here, the authors give an introduction to the fundamentals of the anisotropic magnetoresistive (AMR) and the giant magnetoresistive (GMR) effect as well as an overview of various types of sensors in industrial applications. In addition, the authors present their recent work in this field, ranging from sensor systems fabricated on traditional substrate materials like silicon (Si), over new fabrication techniques for magnetoresistive sensors on flexible substrates for special applications, e.g., a flexible write head for component integrated data storage, micro-stamping of sensors on arbitrary surfaces or three dimensional sensing under extreme conditions (restricted mounting space in motor air gap, high temperatures during geothermal drilling).

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“…The total deposition time is 94 min. The composition of CoFe-alloy is regulated through adding of hydrous iron[II] sulfate (5). The seed layer is removed with ion beam etching.…”

Section: Soft Magnetic Corementioning

confidence: 99%

Development and Optimization of Thin-Film Technology Based Micro Inductors and Transformers

Beringer¹,

Dinulovic²,

Haug³

et al. 2016

ECS Trans.

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The paper presents an overview of the development and the optimization of a thin-film micro-transformer built on a silicon wafer. Here, the solenoid-core micro-transformer is fabricated by means of thin-film technologies. The main impetus of further research is driven by optimization of electrical and magnetic properties. The micro-transformer is designed for high frequency applications in the 15 to 30 MHz range. The energy transformation efficiency in the aforementioned switching frequency range is approximately 80 %.

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Optimization of Mechanical and Magnetic Properties in High, Electroplated Co–Fe-Flux Guides

Cited by 4 publications

References 7 publications

Influence of Deposition Parameters on Mechanical Stress and Magnetic Properties in Thick, Electroplated Co-Fe Flux Guides

Influence of Deposition Parameters on Mechanical Stress and Magnetic Properties in Thick, Electroplated Co-Fe Flux Guides

Recent Developments of Magnetoresistive Sensors for Industrial Applications

Development and Optimization of Thin-Film Technology Based Micro Inductors and Transformers

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