Development and Optimization of Thin-Film Technology Based Micro Inductors and Transformers

Abstract

The paper presents an overview of the development and the optimization of a thin-film micro-transformer built on a silicon wafer. Here, the solenoid-core micro-transformer is fabricated by means of thin-film technologies. The main impetus of further research is driven by optimization of electrical and magnetic properties. The micro-transformer is designed for high frequency applications in the 15 to 30 MHz range. The energy transformation efficiency in the aforementioned switching frequency range is approximately 80 %.