Optimization of electrostatic lens systems for low-energy scanning microcolumn applications

Abstract

The optimization of a low-energy scanning microcolumn is proposed by adopting a modified Einzel lens sandwiched between an aligner and a deflector. The modified Einzel lens is composed of four electrodes, and the two center electrodes are specially designed quadrupole lenses having keyhole type rather than circular apertures. The outer electrodes of the Einzel lens having circular apertures are grounded, and the quadrupole lens is operated by applying the quadrupole voltages. The effects of the separated deflector system and the static quadrupole lens were investigated by analyzing the scanning electron beam spot at the target, and the results show that the proposed system can improve the performance of the scanning microcolumn.

Raman Scattering Study on the Influence of E-Beam Bombardment on Si Electron Lens

“…Microcolumns, which are stacked structures containing an electron emission source, an electron lens (source lens and einzel lens), and a deflector, have many advantages owing to their size (1/100) compared to existing electron columns [ 1 , 2 , 3 ]. In particular, the advanced micro electro-mechanical system (MEMS) process enables the development of a miniaturized structure and the mass production of microcolumns, and it can create a multi-beam structure using n × n array microcolumns [ 4 ].…”

Improved design of 5 nm class electron optical microcolumn for manufacturing convenience and its characteristics

“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16] Among the various microcolumns, the structure demonstrated in the reference 6,9 is outstanding and known to be the best one so far. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16] Among the various microcolumns, the structure demonstrated in the reference 6,9 is outstanding and known to be the best one so far.…”

Design of TiO_{2} nanotube based X-ray tube with single focusing electrode

“…The electrostatic lenses are especially important in so called stationary computed tomography (CT) scans with distributed X-ray tubes [12,14] where hundreds of X-ray sources surround the patient [14]. Depending on applications, electron optics systems can have different combination of electrostatic lenses [15][16][17][18]. Of particular interest are single lens electron optics systems, in which only one lens is located between gating grid and anode.…”